[1] Chen G D, Zheng J L, Wang Z W et al. Fabrication of micro/nano multifunctional patterns on optical glass through chalcogenide heat-mode resist AgInSbTe[J]. Journal of Alloys and Compounds, 867, 158988(2021).

[2] Chen G D, Liu X, Wei T et al. Nanoscale-patterned Cr films by selective etching using a heat-mode resist: implications for X-ray beam splitter[J]. ACS Applied Nano Materials, 5, 1047-1055(2022).

[3] Gong C Y, Fan J, Zou Y G et al. Fabrication of holographic lithography micro-nano gratings using metal mask[J]. Chinese Journal of Lasers, 46, 1203001(2019).

[4] Chen L S, Qiao W, Ye Y et al. Critical technologies of micro-nano-manufacturing and its applications for flexible optoelectronic devices[J]. Acta Optica Sinica, 41, 0823018(2021).

[5] Zhou X L, Miao H C, Li F X. Nanoscale structural and functional mapping of nacre by scanning probe microscopy techniques[J]. Nanoscale, 5, 11885-11893(2013).

[6] Lima E A, Bruno A C, Carvalho H R et al. Scanning magnetic tunnel junction microscope for high-resolution imaging of remanent magnetization fields[J]. Measurement Science and Technology, 25, 105401(2014).

[7] Dong Y H, Yang H B, Zhang L et al. Ultra-uniform nanocrystalline materials via two-step sintering[J]. Advanced Functional Materials, 31, 2007750(2021).

[8] Cao M S, Bo Y M, Gao H B. Combined feedforward control and disturbance rejection control design for a wafer stage: a data-driven approach based on iterative parameter tuning[J]. IEEE Access, 8, 181224-181232(2020).

[9] Zhang K, Chen Z M, Geng Y Y et al. Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime[J]. Chinese Optics Letters, 14, 051401(2016).

[10] CappettiN, NaddeoA, VilleccoF. Fuzzy approach to measures correction on Coordinate Measuring Machines: the case of hole-diameter verification[J]. Measurement, 93, 41-47(2016).

[11] Ren M J, Sun L J, Liu M Y et al. A weighted least square based data fusion method for precision measurement of freeform surfaces[J]. Precision Engineering, 48, 144-151(2017).

[12] Ma X F, Cai Z Q, Yao B et al. Analysis of factors affecting measurement accuracy and establishment of an optimal measurement strategy of a laser displacement sensor[J]. Applied Optics, 59, 10626-10637(2020).

[13] Yang H W, Tao W, Liu K M et al. Irradiance distribution model for laser triangulation displacement sensor and parameter optimization[J]. Optical Engineering, 58, 095106(2019).

[14] Li J K, Feng Q B, Bao C C et al. Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis[J]. Chinese Optics Letters, 17, 011203(2019).

[15] Yang H X, Weichert C, Köchert P et al. Nonlinearity of a double-path interferometer qualified with a non-constant moving speed[J]. Optics Letters, 41, 5478-5481(2016).

[16] Zhao C Y, Li Y, Yao Y X et al. Random residual neural network-based nanoscale positioning measurement[J]. Optics Express, 28, 13125-13130(2020).

[17] Bae W, Kim Y, Moon Y H et al. Simultaneous thickness variation and surface profiling of glass plates using Fizeau interferometer with elimination of offset phase error[J]. Optics Communications, 480, 126500(2021).

[18] Lou Y T, Li Z Y, Yan L P et al. A phase differential heterodyne interferometer for simultaneous measurement of straightness error and displacement[J]. Optics Communications, 497, 127195(2021).

[19] Vo Q S, Duan Y T, Zhang X D et al. Non-contact method of thickness measurement for a transparent plate using a laser auto-focus scanning probe[J]. Applied Optics, 58, 9524-9531(2019).

[20] Zheng J G, Wei Q, Yu L Y et al. Simple optical method for small angular displacement measurement based on the astigmatic effect[J]. Chinese Optics Letters, 14, 030801(2016).

[21] Duan Y T, Vo Q S, Zhang X D et al. Novel method of measuring optical freeform surface based on laser focusing probe without calibrating focus error signal[J]. Measurement, 148, 106961(2019).

[22] Křen P. Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages[J]. Measurement Science and Technology, 25, 044017(2014).

[23] Li X C, Zhang Z Y, Hu H F et al. Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning[J]. Optical Engineering, 57, 044105(2018).

[24] Xu F H, Zhang Y X, Zhang L X. An effective framework for 3D shape measurement of specular surface based on the dichromatic reflection model[J]. Optics Communications, 475, 126210(2020).

[25] Zhang X B, Liu H J. Measurement and model reconstruction of topography of sealing plane based on digital holography[J]. Acta Optica Sinica, 38, 0912001(2018).

[26] Huang Q X, Wu K, Wang C C et al. Development of an abbe error free micro coordinate measuring machine[J]. Applied Sciences, 6, 97(2016).

[27] Ouyang Q, Wen C, Song Y D et al. Approach for designing and developing high-precision integrative systems for strip flatness detection[J]. Applied Optics, 54, 8429-8438(2015).

[28] Andrushchak A S, Voronyak T I, Yurkevych O V et al. Interferometric technique for controlling wedge angle and surface flatness of optical slabs[J]. Optics and Lasers in Engineering, 51, 342-347(2013).

[29] Liang X, Bai Z, Wei J S. Movement flatness error measurement based on an astigmatic method[J]. Applied Optics, 56, 4347-4352(2017).