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Acta Optica Sinica, Volume. 42, Issue 19, 1912005(2022)

Measurement and Optimization of Movement Parallelism Based on Spot Image Method

Xing Liu1,2, Xiaozhong Xu1,2, Tao Wei3, and Jingsong Wei1、*
Author Affiliations
  • 1Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3School of Materials Science and Engineering, Suzhou University of Science and Technology, Suzhou Key Laboratory for Nanophotonic and Nanoelectronic Materials and Its Devices, Suzhou 215009, Jiangsu , China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
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    References (29)
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    Figures & Tables(12)
    Theoretical model. (a) Schematic diagram of biased light spot; (b) schematic diagram of optical path

    Fig. 1. Theoretical model. (a) Schematic diagram of biased light spot; (b) schematic diagram of optical path

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    Simulation curve. (a) Relationship between defocus distance and spot radius for different f1; (b) relationship between defocus distance and spot radius for different m

    Fig. 2. Simulation curve. (a) Relationship between defocus distance and spot radius for different f1; (b) relationship between defocus distance and spot radius for different m

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    Flow chart of spot image processing

    Fig. 3. Flow chart of spot image processing

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    Measurement process. (a) Diagram of system optical path; (b) scanning motion of motorized stage; (c) acquisition of spot images; (d) mapping spot images to defocus distance; (e) three-dimensional picture of movement parallelism

    Fig. 4. Measurement process. (a) Diagram of system optical path; (b) scanning motion of motorized stage; (c) acquisition of spot images; (d) mapping spot images to defocus distance; (e) three-dimensional picture of movement parallelism

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    Defocus distance and spot image. (a) Spot image with defocus distance of 0; (b) spot image with defocus distance of 3 μm; (c) spot image with defocus distance of 6 μm; (d) spot image with defocus distance of 6.348 μm;(e) spot image with distance of 9 μm; (f) spot image with defocus distance of 12 μm; (g) spot image with defocus distance of 15 μm; (h) spot image with defocus distance of 17.34 μm

    Fig. 5. Defocus distance and spot image. (a) Spot image with defocus distance of 0; (b) spot image with defocus distance of 3 μm; (c) spot image with defocus distance of 6 μm; (d) spot image with defocus distance of 6.348 μm;(e) spot image with distance of 9 μm; (f) spot image with defocus distance of 12 μm; (g) spot image with defocus distance of 15 μm; (h) spot image with defocus distance of 17.34 μm

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    Function relationship between defocus distance and spot image. (a) Fitting function curve of defocus distance and spot gray mean value; (b) fitting function curve of defocus distance and spot radius; (c) derivative curves of fitting functions

    Fig. 6. Function relationship between defocus distance and spot image. (a) Fitting function curve of defocus distance and spot gray mean value; (b) fitting function curve of defocus distance and spot radius; (c) derivative curves of fitting functions

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    Mapping of defocus distance to spot image. (a) Mapping of defocus distance to spot gray mean value; (b) mapping of defocus distance to spot radius; (c) flow chart of classification mapping processing

    Fig. 7. Mapping of defocus distance to spot image. (a) Mapping of defocus distance to spot gray mean value; (b) mapping of defocus distance to spot radius; (c) flow chart of classification mapping processing

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    Precision verification diagram of measuring system. (a1)-(c1) Moving distance of piezoelectric ceramics is 150 nm;(a2)-(c2) moving distance of piezoelectric ceramics is 100 nm; (a3)-(c3) moving distance of piezoelectric ceramics is 50 nm

    Fig. 8. Precision verification diagram of measuring system. (a1)-(c1) Moving distance of piezoelectric ceramics is 150 nm;(a2)-(c2) moving distance of piezoelectric ceramics is 100 nm; (a3)-(c3) moving distance of piezoelectric ceramics is 50 nm

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    Step height measurement of test sample. (a) Test sample; (b) step height measurement result

    Fig. 9. Step height measurement of test sample. (a) Test sample; (b) step height measurement result

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    Three-dimensional diagram of movement parallelism (dashed box plane is reference plane). (a) Measurement result of spot image method before optimization; (b) measurement result of displacement sensor before optimization; (c) measurement result of spot image method after optimization; (d) measurement result of displacement sensor after optimization

    Fig. 10. Three-dimensional diagram of movement parallelism (dashed box plane is reference plane). (a) Measurement result of spot image method before optimization; (b) measurement result of displacement sensor before optimization; (c) measurement result of spot image method after optimization; (d) measurement result of displacement sensor after optimization

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    • Table 1. Coefficients of fitting functions and derivative functions

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      Table 1. Coefficients of fitting functions and derivative functions

      CoefficientFitting function 1 （i=1）Fitting function 2（i=2）Derivative function 1（i=3）Derivative function 2 （i=4）
      Ai0.0000144267220032400.0359660.000129840498029160.10790
      Bi0.0011868997672292835.5954500.009495198137834265.19090
      Ci0.04112949552415728634.538000.2879064686691010034.5380
      Di0.779618900546933333297.76644.67771340328160000
      Ei8.78564201549238000043.9282100774619000
      Fi59.97781052539600000239.911242101584000
      Gi243.8104238874240000731.431271662272000
      Hi580.06148332591500001160.12296665183000
      Ii973.8482258709920000973.848225870992000
      Ji2090.196725693620000

    • Table 2. Spot image measurement

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      Table 2. Spot image measurement

      Test result1 min30 min60 min90 min120 min150 min180 min
      Average1097.081097.001096.451096.711096.891096.751096.51
      Maximum1097.941097.941097.941098.551098.551098.551098.55
      Minimum1096.251095.621095.241095.241095.241094.901094.90
      Range1.692.322.703.313.313.653.65
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    Xing Liu, Xiaozhong Xu, Tao Wei, Jingsong Wei. Measurement and Optimization of Movement Parallelism Based on Spot Image Method[J]. Acta Optica Sinica, 2022, 42(19): 1912005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 3, 2022

    Accepted: Apr. 15, 2022

    Published Online: Oct. 18, 2022

    The Author Email: Wei Jingsong (weijingsong@siom.ac.cn)

    DOI:10.3788/AOS202242.1912005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology