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Journal of Synthetic Crystals, Volume. 52, Issue 1, 48(2023)

Influence of Abrasive Morphology and Dispersion Medium on Lapping Quality of 4H-SiC Wafers

ZHANG Xi1,2, ZHU Ruzhong1,2, ZHANG Xuqing1,2, WANG Minghua3, GAO Yu4, WANG Rong1,2, YANG Deren1,2, and PI Xiaodong1,2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    ZHANG Xi, ZHU Ruzhong, ZHANG Xuqing, WANG Minghua, GAO Yu, WANG Rong, YANG Deren, PI Xiaodong. Influence of Abrasive Morphology and Dispersion Medium on Lapping Quality of 4H-SiC Wafers[J]. Journal of Synthetic Crystals, 2023, 52(1): 48

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    Received: Aug. 22, 2022

    Accepted: --

    Published Online: Mar. 18, 2023

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    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology