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Chinese Journal of Lasers, Volume. 52, Issue 14, 1402103(2025)

Research Progress on Water‐Jet Laser Precision Processing Technology(Invited)

Yulu Zhang1, Shengzhi Sun1、*, Ye Dai2, Bin Qian3, and Jianrong Qiu4
Author Affiliations
  • 1Faculty of Information Science and Engineering, Ningbo University, Ningbo 315211, Zhejiang , China
  • 2Institute of Quantum Science and Technology, Department of Physics, Shanghai University, Shanghai 200444, China
  • 3Ningbo Jiangxin Rapid Prototyping Technology Co., Ltd., Ningbo 315211, Zhejiang , China
  • 4College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China
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    [1] Choudhary A, das Chakladar N, Paul S. Identification and estimation of defects in high-speed ground C/SiC ceramic matrix composites[J]. Composite Structures, 261, 113274(2021).

    [2] Li H S, Prinz S, Liu Y et al. Experiment and smooth particle hydrodynamic modeling of single-grain diamond scribing of silicon carbide fiber reinforced silicon carbide (SiCf/SiC)[J]. CIRP Annals, 72, 263-266(2023).

    [3] Zhang B Y, Sui T Y, Lin B et al. Drilling process of Cf/SiC ceramic matrix composites: cutting force modeling, machining quality and PCD tool wear analysis[J]. Journal of Materials Processing Technology, 304, 117566(2022).

    [4] Chen M, Yang M E. Research on the influence of electrical parameters on material removal rate in EDM[J/OL]. Machinery Design & Manufacture, 1-5. https:∥doi.org/10.19356/j.cnki.1001-3997.20241227.024

    [5] Liu Y S, Wang C H, Li W N et al. Effect of energy density on the machining character of C/SiC composites by picosecond laser[J]. Applied Physics A, 116, 1221-1228(2014).

    [6] Demarbaix A, Ducobu F, Juste E et al. Experimental investigation on green ceramic machining with nanosecond laser source[J]. Journal of Manufacturing Processes, 61, 245-253(2021).

    [7] Nian Z W, Zhao G L, Xin L J et al. Laser-induced oxidation of Cf/SiC composites: oxidation behavior analysis and parameter optimization[J]. Ceramics International, 50, 33445-33454(2024).

    [8] Lu X Z, Jiang K Y. Research and application development of compound energy field processing: laser microjet[J]. Scientia Sinica Physica, 50, 034203(2020).

    [9] Zhang Y N, Qiao H C, Zhao J B et al. Research on the influence of the jet flow regime in the kerf on the cutting surface accuracy in WJGL[J]. Materials Today Communications, 35, 105503(2023).

    [10] Marimuthu S, Dunleavey J, Liu Y et al. Laser cutting of aluminium-alumina metal matrix composite[J]. Optics & Laser Technology, 117, 251-259(2019).

    [11] Wagner F, Sibailly O, Vágó N et al. The laser microjet® technology‒10 years of development[C], M401-16(2003).

    [12] Brecher C, Janssen H, Eckert M et al. Thermal investigation of interaction between high-power CW-laser radiation and a water-jet[J]. Physics Procedia, 83, 317-327(2016).

    [13] Li L, Wang Y, Yang L J et al. Experimental research on water-jet guided laser processing[J]. Proceedings of SPIE, 6595, 659525(2007).

    [14] Wang Y, Yang L J, Tang J et al. Laser and water-jet fiber coupling technology for water-jet guided laser micromachining[J]. Advanced Materials Research, 69/70, 29-33(2009).

    [15] Wang Y, Li L, Yang L J et al. Simulation and experimental research on water-jet guided laser cutting silicon wafer[C], 1-6(2008).

    [16] Huang Y X, Zhao Y W, Yang L F et al. Theoretical study of water jet guided laser technology based on non-uniform electric field deflection water jet[J]. Optics Communications, 442, 31-39(2019).

    [17] Ye R F. Research on the optical properties and key technologies of a novel water jet guided laser processing system[D](2009).

    [18] Wang J, Chen C G, Wang G L et al. Efficient coupling of dual beam combined laser into micro water jet for deep processing[J]. Scientific Reports, 15, 1083(2025).

    [19] Zhang Y N, Qiao H C, Zhao J B et al. Research on the mechanism of micro-water jet-guided laser precision drilling in metal sheet[J]. Micromachines, 12, 343(2021).

    [20] Feng S C. Study on near-damage-free micromachining mechanisms of single crystal silicon carbide wafer using hybrid laser-waterjet[D](2018).

    [21] Jiang X Q, Ma Y, Rong Y et al. Study on coupling alignment technology between infrared laser and microbeam[J]. Laser & Infrared, 49, 680-685(2019).

    [22] Bao B Y, Zhang G Y, Chen Z A et al. Splashing effects and mechanism in water jet-guided laser processing of Cf/SiC composites[J]. Journal of Materials Processing Technology, 335, 118671(2025).

    [23] Nie S L, Wu R, Ji H et al. Cavitation characteristics of water guided laser nozzle on water jet fiber stability[J]. Physics of Fluids, 37, 033601(2025).

    [24] Wang S W, Ding Y, Cheng B et al. Mechanism and research advances of water-jet guided laser micromachining[J]. Chinese Journal of Lasers, 49, 1002404(2022).

    [25] Zhang G H, Huang Y X, Huang P et al. Study on the coupling characteristics of water-jet guided high-power laser based on negative defocus coupling alignment method[J]. Applied Physics B, 131, 6(2024).

    [26] Liu Y, Wei M R, Zhang T et al. Overview on the development and critical issues of water jet guided laser machining technology[J]. Optics & Laser Technology, 137, 106820(2021).

    [27] Couty P, Wagner F, Hoffmann P. Laser coupling with a multimode water-jet waveguide[J]. Optical Engineering, 44, 068001(2005).

    [28] Wei M R, Zhang T, Liu Y et al. Laser coupling in waterjets subject to jet instabilities, laser parameters, and alignment errors[J]. Optics Express, 31, 12967-12985(2023).

    [29] Marimuthu S, Dunleavey J, Liu Y et al. Water-jet guided laser drilling of SiC reinforced aluminium metal matrix composites[J]. Journal of Composite Materials, 53, 3787-3796(2019).

    [30] Zhan C J, Li C F, Pan Y C et al. Analysis of fluid flow in micro-waterjet guided laser precision drilling process[J]. Chinese Quarterly of Mechanics, 32, 159-165(2011).

    [31] Li J Y. Research on the coupling chanracteristics and material ablation experiments of water-jet guided nanosecond laser processing[D](2019).

    [32] Li C F, Johnson D B, Kovacevic R. Modelling of heat transfer in waterjet guided laser drilling of silicon[J]. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 217, 583-600(2003).

    [33] Chen Z A, Zhang G Y, Bao B Y et al. Experimental and mechanism study of efficient CFRP cutting based on continuous wave laser and water jet guided laser combined technology[J]. Optics & Laser Technology, 184, 112466(2025).

    [34] Cheng B, Ding Y, Li Y et al. Theoretical and experimental investigation on SiC/SiC ceramic matrix composites machining with laser water jet[J]. Applied Sciences, 12, 1214(2022).

    [35] Zhu T. The basic research on the water-jet guided laser processing technology of superalloy with thermal barrier coating[D](2022).

    [36] Liao Z R, Xu D D, Axinte D et al. Surface formation mechanism in waterjet guided laser cutting of a Ni-based superalloy[J]. CIRP Annals, 70, 155-158(2021).

    [37] Li D X, Xing F, Jia X L et al. Analysis of remelted layers of DD6 single-crystal superalloys by water jet-guided laser processing[J]. Journal of Alloys and Compounds, 1010, 177637(2025).

    [38] Wei J Y, Yuan S M, Zhang J Q et al. Removal mechanism of SiC/SiC composites by underwater femtosecond laser ablation[J]. Journal of the European Ceramic Society, 42, 5380-5390(2022).

    [39] Ma Y Z, Zhao W, Zhang H T et al. A new method for laser grooving titanium alloy with the assist of a hybrid of gas jet and waterjet[J]. Journal of Materials Processing Technology, 315, 117906(2023).

    [40] Chen X H, Li X, Wu C et al. Optimization of processing parameters for water-jet-assisted laser etching of polycrystalline silicon[J]. Applied Sciences, 9, 1882(2019).

    [41] Liu B. Study of processing technology based on laser-microjet[D](2008).

    [42] Wu R, Nie S L, Ji H et al. Effect of multi-parameter optimization of water-laser coupling device and nozzle geometry on the stability of water-jet guided laser beam[J]. Physics of Fluids, 36, 013620(2024).

    [43] Zhang X B, Shi T L, Long H. Study on the influence of cavitation on the stability of water-guide laser micro-water beam[J]. Laser Technology, 48, 216-222(2024).

    [44] Begenir A, Tafreshi H V, Pourdeyhimi B. Effect of nozzle geometry on hydroentangling water jets: experimental observations[J]. Textile Research Journal, 74, 178-184(2004).

    [45] Anantharamaiah N. An investigation of the influence of nozzle geometry in the hydroentangling process[D](2007).

    [46] Ng E Y, Du G N. The stability of 30-μm-diameter water jet for jet-guided laser machining[J]. The International Journal of Advanced Manufacturing Technology, 78, 939-946(2015).

    [47] Cheng B, Ding Y, Li Y et al. Coaxial helical gas assisted laser water jet machining of SiC/SiC ceramic matrix composites[J]. Journal of Materials Processing Technology, 293, 117067(2021).

    [48] Pauchard A, Vago N, Richerzhagen B. Experimental micromachining results using a UV laser with the laser microjet®[C], 709-714(2008).

    [49] Su Z H, Liu B B, Zhang Y L et al. Precision processing of Nb-Si alloy via water-jet guided laser: realization of inhibited-oxidation and small-taper[J]. Optics & Laser Technology, 187, 112853(2025).

    [50] Zhang P, Gao Y R, Yu Y et al. Effects of water-jet guided laser surface strengthening on surface properties and fatigue life of TC4 titanium alloy in tension-tension fatigue tests[J]. Vacuum, 232, 113863(2025).

    [51] Sun D, Han F Z, Ying W S. The experimental investigation of water jet-guided laser cutting of CFRP[J]. The International Journal of Advanced Manufacturing Technology, 102, 719-729(2019).

    [52] Zhao Z, Zhang G H, Huang Y X et al. Water jet guided high-power laser energy transmission loss analysis[J]. The International Journal of Advanced Manufacturing Technology, 130, 5379-5389(2024).

    [53] Xu J J. Basic research on the water-jet guided laser processing technology of SiCf/SiC composites[D](2019).

    [54] Zhang Y N, Qiao H C, Zhao J B et al. Numerical simulation of water jet–guided laser micromachining of CFRP[J]. Materials Today Communications, 25, 101456(2020).

    [55] Yin P Q, Xu B P, Liu Y H. Simulation of evaporation ablation dynamics of materials by nanosecond pulse laser of Gaussian beam and flat-top beam[J]. Acta Physica Sinica, 73, 095202(2024).

    [56] Yang L J, Wang M L, Wang Y et al. Numerical simulation on the temperature field of water-jet guided laser micromachining[J]. Advanced Materials Research, 69/70, 333-337(2009).

    [57] Zhang Y N, Qiao H C, Zhao J B et al. Research on water jet-guided laser micro-hole machining of 6061 aluminum alloy[J]. The International Journal of Advanced Manufacturing Technology, 118, 1-13(2022).

    [58] Jiao H, Zhang G H, Huang P et al. A multiphase flow model simulation of water jet-guided laser drilling in 304 stainless steel[J]. Journal of Manufacturing Processes, 120, 170-191(2024).

    [59] Cao Z H, Qiao H C, Han X L et al. A spectroscopic real-time characterization method of material removal efficiency in water jet guided laser machining technology[J]. Optics & Laser Technology, 190, 113215(2025).

    [60] Adelmann B, Ngo C, Hellmann R. High aspect ratio cutting of metals using water jet guided laser[J]. The International Journal of Advanced Manufacturing Technology, 80, 2053-2060(2015).

    [61] Wang S W, Xie W D, Ding Y et al. Investigations on the water-jet guided laser drilling film cooling holes on the 8.5 mm-thick TBC superalloy[J]. Journal of Manufacturing Processes, 125, 374-388(2024).

    [62] Li C Q. Research on water-jet guided laser micromachining system and key technology[D](2012).

    [63] Lawrence J, Peligrad A A, Zhou E et al. Prediction of melt depth in selected architectural materials during high-power diode laser treatment[J]. Optics and Lasers in Engineering, 35, 51-62(2001).

    [64] Zhang Y L, Wang Y Y, Hu J C et al. Rapid high-precision machining of LTCC utilizing water-jet guided laser technology: expanding the horizons of functional ceramic processing[J]. Materials Today Communications, 41, 111013(2024).

    [65] Wu Y W, Zhang G Y, Wang J X et al. The cutting process and damage mechanism of large thickness CFRP based on water jet guided laser processing[J]. Optics & Laser Technology, 141, 107140(2021).

    [66] Sun D, Wang J H, Han F Z. Contrastive study of water jet guided laser and water jet assisted laser cutting of monocrystalline silicon[J]. Applied Laser, 36, 723-727(2016).

    [67] Shi G F, Han D D, Wang S K et al. Analysis and evaluation of natural diamond cut by water jet-guided laser[C], 195-198(2017).

    [68] Wei J Y, Yuan S M, Yang S et al. Waterjet-guided laser processing of SiC/SiC ceramic matrix composites to obtain high cleanliness and low oxidation damage characteristics surfaces[J]. Surface and Coatings Technology, 484, 130791(2024).

    [69] Chao Y, Liu Y Z, Xu Z F et al. Improving superficial microstructure and properties of the laser-processed ultrathin kerf in Ti-6Al-4V alloy by water-jet guiding[J]. Journal of Materials Science & Technology, 156, 32-53(2023).

    [70] Li C F, Johnson D B, Kovacevic R. Modeling of waterjet guided laser grooving of silicon[J]. International Journal of Machine Tools and Manufacture, 43, 925-936(2003).

    [71] Jiao H, Liu Q Y, Zhang G H et al. Numerical investigations of water jet-guided laser cutting of silicon[J]. Journal of Laser Applications, 36, 012025(2024).

    [72] Qiao H C, Cao Z H, Cui J F et al. Experimental study on water jet guided laser micro-machining of mono-crystalline silicon[J]. Optics & Laser Technology, 140, 107057(2021).

    [73] Lu Y M, Duan Y Z, Liu X Q et al. High-quality rapid laser drilling of transparent hard materials[J]. Optics Letters, 47, 921-924(2022).

    [74] Chen J Y, Chen S L, Lin Z H et al. Enhancing machining efficiency and precision: water-jet guided laser fabrication of diamond micro-milling tool[J]. Optics & Laser Technology, 181, 112040(2025).

    [75] Zhang Y T, Qiao H C, Wang S S et al. Experimental study of quality and efficiency of CFRP processed by water-jet guided laser[J]. Laser & Infrared, 54, 1201-1207(2024).

    [76] Wang J, Zhang W W. High repetition frequency solid-state green laser with large stable area for water jet guided[J]. Micromachines, 14, 2231(2023).

    [77] Bao B Y, Zhang G Y, Chen Z A et al. Experimental investigation of water jet-guided laser micro-hole drilling of Cf/SiC composites[J]. Materials, 17, 1975(2024).

    [78] Zhang G Y, Wang J Y, Chen Z A et al. An optical field regulation method for waterjet-guided laser: reducing taper and improving deep-processing capability[J]. Journal of Materials Processing Technology, 334, 118637(2024).

    [79] Marimuthu S, Smith B. Water-jet guided laser drilling of thermal barrier coated aerospace alloy[J]. The International Journal of Advanced Manufacturing Technology, 113, 177-191(2021).

    [80] Xie W D. Research on water-jet guided laser drilling of superalloy with thermal barrier coating[D](2019).

    [81] Liu Y Z. Coaxial waterjet-assisted laser drilling of film cooling holes in turbine blades[J]. International Journal of Machine Tools and Manufacture, 150, 103510(2020).

    [82] Li Y, Wang S W, Ding Y et al. Investigation on the coaxial-annulus-argon-assisted water-jet-guided laser machining of hard-to-process materials[J]. Materials, 16, 5569(2023).

    [83] Wang T H, Mei L L, Ao H L et al. A kind of laser coupling head[P].

    [84] Mei L L, Ao H L, Wang T H et al. A laser processing head with balanced water pressure[P].

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    Yulu Zhang, Shengzhi Sun, Ye Dai, Bin Qian, Jianrong Qiu. Research Progress on Water‐Jet Laser Precision Processing Technology(Invited)[J]. Chinese Journal of Lasers, 2025, 52(14): 1402103

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    Paper Information

    Category: Laser Forming Manufacturing

    Received: Apr. 3, 2025

    Accepted: Jun. 23, 2025

    Published Online: Jul. 10, 2025

    The Author Email: Shengzhi Sun (sunshengzhi@nbu.edu.cn)

    DOI:10.3788/CJL250665

    CSTR:32183.14.CJL250665

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology