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Acta Optica Sinica, Volume. 19, Issue 7, 953(1999)

Optical Proximity Correction in Laser Direct Writing

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3Central Microstructure Facility, Ratherford Appleton Lab. Chilton, Didcot, OX11 OQX, UK
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    References(3)

    [1] [1] Langlois P. DOE fabricated by laser writing and other technique. Proc. SPIE, 1992, 1751:2～12

    [4] [4] Levenson M D. Extending the lifetime of optical lithography technology with wavefront engineering. Jpn. J. Appl. Phys., 1994, 33(12B):6765～6773

    [5] [5] Babin S. Measuring the proximity effects in laser pattern generation. Opt. Engng., 1997, 36(9):2508～2512

    CLP Journals

    [1] Song Jing, Geng Yongyou. Preparation of Polyvinyl Alcohol (PVA)/Siver (Ag) Nanocomposite Film Applied in Laser Direct Writing of Blue Ray (405 nm)[J]. Acta Optica Sinica, 2012, 32(9): 931003

    [2] ZHANG Shan, WANG Lei. Optical Proximity Correction for Low Resolution Acoustooptic Modulator[J]. Opto-Electronic Engineering, 2012, 39(4): 129

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Proximity Correction in Laser Direct Writing[J]. Acta Optica Sinica, 1999, 19(7): 953

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 15, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology