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Acta Optica Sinica, Volume. 19, Issue 7, 953(1999)

Optical Proximity Correction in Laser Direct Writing

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3Central Microstructure Facility, Ratherford Appleton Lab. Chilton, Didcot, OX11 OQX, UK
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Proximity Correction in Laser Direct Writing[J]. Acta Optica Sinica, 1999, 19(7): 953

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 15, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology