Researching | Optical performances of near-infrared metalenses with process-induced defects

Chinese Optics Letters, Volume. 23, Issue 6, 063602(2025)

Optical performances of near-infrared metalenses with process-induced defects

Xiaofei Liu¹, Ruohui Chen¹, Yilin Lu¹, Chenxu Zhu², Yang Qiu¹, Xingyan Zhao¹, Shaonan Zheng¹, Qize Zhong¹, Bo Cui², Yuan Dong^1,3、*, and Ting Hu¹

Author Affiliations

¹School of Microelectronics, Shanghai University, Shanghai 201800, China

²Department of Electrical and Computer Engineering, University of Waterloo, Waterloo N2L 3G1, Canada

³Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology, Shanghai University, Shanghai 201800, China

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Xiaofei Liu, Ruohui Chen, Yilin Lu, Chenxu Zhu, Yang Qiu, Xingyan Zhao, Shaonan Zheng, Qize Zhong, Bo Cui, Yuan Dong, Ting Hu, "Optical performances of near-infrared metalenses with process-induced defects," Chin. Opt. Lett. 23, 063602 (2025)

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Paper Information

Category: Nanophotonics, Metamaterials, and Plasmonics

Received: Jul. 31, 2024

Accepted: Jan. 13, 2025

Posted: Jan. 13, 2025

Published Online: May. 27, 2025

The Author Email: Yuan Dong (dongyuan@shu.edu.cn)

DOI:10.3788/COL202523.063602

CSTR:32184.14.COL202523.063602

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology