Chinese Optics Letters, Volume. 23, Issue 6, 063602(2025)
Optical performances of near-infrared metalenses with process-induced defects
Fig. 1. (a) Transmission and phase as a function of d for the ideal nanopillars at λ = 940 nm. The inset shows the schematic of a unit cell. (b)–(e) Schematics of different types of defects. (f) and (g) The tilted-view SEM images of the reference metalens without designed defects.
Fig. 2. Experimental setup used to capture the focal plane images.
Fig. 3. Measured results of metalenses with CD bias. (a) Normalized focal plane intensity profiles. (b) The optical microscopy image of the metalens with Δd = 30 nm. (c) The SEM image of pillars with d = 250 nm. (d) Normalized intensity cross-sections of the focal spots. (e) Simulated and measured focusing efficiencies. (f) MTF and (g) Strehl ratio curves with various Δd.
Fig. 4. Measured results of metalenses with random missing pillars. (a) Normalized focal plane intensity profiles. (b) The optical microscopy image of the metalens with ms = 40%. (c) Normalized intensity cross-sections of the focal spots. (d) Simulated and measured focusing efficiencies. (e) MTF and (f) Strehl ratio curves with various ms.
Fig. 5. Measured results of metalenses with a void disk. (a) Normalized focal plane intensity profiles. (b) The optical microscopy image of the metalens with a void disk with D = 30 µm and ΔL = 50 µm. The inset shows the SEM image of the void disk. (c) and (d) Normalized intensity cross-sections of the focal spots with a void disk of D = 30 and D = 60 µm, respectively. (e) Simulated and measured focusing efficiencies. (f) MTF and (g) Strehl ratio curves with various D and ΔL.
Fig. 6. Measured results of metalenses with a solid disk. (a) Normalized focal plane intensity profiles. (b) The optical microscopy image of the metalens with a solid disk with D = 30 µm and ΔL = 50 µm. The inset shows the SEM image of the solid disk. (c) and (d) Normalized intensity cross-sections of the focal spots with a solid disk of D = 30 and 60 µm, respectively. (e) Simulated and measured focusing efficiencies. (f) MTF and (g) Strehl ratio curves with various D and ΔL.
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Xiaofei Liu, Ruohui Chen, Yilin Lu, Chenxu Zhu, Yang Qiu, Xingyan Zhao, Shaonan Zheng, Qize Zhong, Bo Cui, Yuan Dong, Ting Hu, "Optical performances of near-infrared metalenses with process-induced defects," Chin. Opt. Lett. 23, 063602 (2025)
Category: Nanophotonics, Metamaterials, and Plasmonics
Received: Jul. 31, 2024
Accepted: Jan. 13, 2025
Posted: Jan. 13, 2025
Published Online: May. 27, 2025
The Author Email: Yuan Dong (dongyuan@shu.edu.cn)