Microelectronics, Volume. 55, Issue 1, 165(2025)

Study on Application of EOTPR on Semiconductor Advanced Packaging

CHEN Xuanlong1,2, KONG Genyong1,2, SHI Gaoming1,2, HE Guanghui1,2, LIU Jiahao1, LIN Xiaoling1, and LI Chao1
Author Affiliations
  • 1The 5th Electronics Research Institute, Ministry of Industry and Information Technology, Guangzhou 511370, P. R. China
  • 2Reliability Research and Analysis Centre, China CEPREI Laboratory, Guangzhou 511370, P. R. China
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    References(5)

    [4] [4] GU A, ANDREYEV A, TERADA M, et al. A deep learning reconstruction technique and workflow to enhance 3D X-ray imaging resolution and speed for electronics package failure analysis[C]//International Conference on Electronics Packaging. Kumamoto, Japan. 2023: 69-70.

    [5] [5] XIE M Y, BEGALA T, KIJKANJANAPAIBOON K, et al. Innovations in fault isolation methods for 3D packages with 10X improvement in accuracy[C]//IEEE 66th Electronic Components and Technology Conference. Las Vegas, NV, USA. 2016: 755-765.

    [7] [7] SHANG Y, SHINOHARA M, KATO E, et al. A preliminary study on the soft defects modeling and measurement method using time-domain reflectometry[C]//IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits. Pulau Pinang, Malaysia. 2023: 1-5.

    [8] [8] SHANG Y, SHINOHARA M, KATO E, et al. Defect identification in branched traces by high-resolution time-domain reflectometry[C]//IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits. Singapore. 2022: 1-7.

    [9] [9] REVERDY A, MARCHETTI M, FUDOLI A, et al. Electro optical terahertz pulse reflectometry, a non destructive technique to localize defects on various type of package[J]. Microelectronics Reliability, 2014, 54(9-10): 2075-2080.

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    CHEN Xuanlong, KONG Genyong, SHI Gaoming, HE Guanghui, LIU Jiahao, LIN Xiaoling, LI Chao. Study on Application of EOTPR on Semiconductor Advanced Packaging[J]. Microelectronics, 2025, 55(1): 165

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    Paper Information

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    Received: May. 1, 2024

    Accepted: Jun. 19, 2025

    Published Online: Jun. 19, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240094

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