Acta Optica Sinica, Volume. 35, Issue 11, 1111002(2015)
Illumination Mode Conversion System Design Based on Micromirror Array in Lithography
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Xing Shasha, Ran Yinghua, Jiang Haibo, Xing Tingwen. Illumination Mode Conversion System Design Based on Micromirror Array in Lithography[J]. Acta Optica Sinica, 2015, 35(11): 1111002
Paper Information
Category: Imaging Systems
Received: Apr. 29, 2015
Accepted: --
Published Online: Nov. 27, 2015
The Author Email: Shasha Xing (drizzlyrain3@163.com)
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