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Acta Optica Sinica, Volume. 35, Issue 11, 1111002(2015)

Illumination Mode Conversion System Design Based on Micromirror Array in Lithography

Xing Shasha*, Ran Yinghua, Jiang Haibo, and Xing Tingwen
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    Article index updated: Mar. 10, 2025

    The article is cited by 6 article(s) CLP online library. (Some content might be in Chinese.)
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    Xing Shasha, Ran Yinghua, Jiang Haibo, Xing Tingwen. Illumination Mode Conversion System Design Based on Micromirror Array in Lithography[J]. Acta Optica Sinica, 2015, 35(11): 1111002

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    Paper Information

    Category: Imaging Systems

    Received: Apr. 29, 2015

    Accepted: --

    Published Online: Nov. 27, 2015

    The Author Email: Shasha Xing (drizzlyrain3@163.com)

    DOI:10.3788/aos201535.1111002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology