Interference-aided spectrum-fitting method for accurate film thickness determination

Xingxing Liu; Shaowei Wang; Hui Xia; Xutao Zhang; Ruonan Ji; Tianxin Li; Wei Lu

doi:10.3788/COL201614.081203

Chinese Optics Letters, Volume. 14, Issue 8, 081203(2016)

Interference-aided spectrum-fitting method for accurate film thickness determination

Xingxing Liu^1,2,3, Shaowei Wang^1,2、*, Hui Xia¹, Xutao Zhang^1,3, Ruonan Ji^1,2,3, Tianxin Li^1,2, and Wei Lu^1,2

¹National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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Xingxing Liu, Shaowei Wang, Hui Xia, Xutao Zhang, Ruonan Ji, Tianxin Li, Wei Lu, "Interference-aided spectrum-fitting method for accurate film thickness determination," Chin. Opt. Lett. 14, 081203 (2016)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Mar. 31, 2016

Accepted: Jun. 14, 2016

Published Online: Aug. 3, 2018

The Author Email: Shaowei Wang (wangshw@mail.sitp.ac.cn)

DOI:10.3788/COL201614.081203

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology