Journal of Semiconductors, Volume. 43, Issue 8, 082802(2022)
Influence of epitaxial layer structure and cell structure on electrical performance of 6.5 kV SiC MOSFET
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Lixin Tian, Zechen Du, Rui Liu, Xiping Niu, Wenting Zhang, Yunlai An, Zhanwei Shen, Fei Yang, Xiaoguang Wei. Influence of epitaxial layer structure and cell structure on electrical performance of 6.5 kV SiC MOSFET[J]. Journal of Semiconductors, 2022, 43(8): 082802
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Received: Mar. 8, 2022
Published Online: Aug. 23, 2022
The Author Email: Tian Lixin (firstname.lastname@example.org), Yang Fei (email@example.com)