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Chinese Journal of Lasers, Volume. 43, Issue 5, 516001(2016)

Research on Temperature Distribution of Deep Ultraviolet Lithographic Projection Objective

Yao Changcheng1,2、* and Gong Yan1
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    Yao Changcheng, Gong Yan. Research on Temperature Distribution of Deep Ultraviolet Lithographic Projection Objective[J]. Chinese Journal of Lasers, 2016, 43(5): 516001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Dec. 29, 2015

    Accepted: --

    Published Online: May. 4, 2016

    The Author Email: Changcheng Yao (yaochangcheng18@126.com)

    DOI:10.3788/cjl201643.0516001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology