Chinese Journal of Lasers, Volume. 39, Issue s1, 108013(2012)
Research on the Long Range Precision Alignment System with Sub-Micron Accuracy
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Zhang Jinlong, Lian Meilin, Xu Hui, Lei Huahuan. Research on the Long Range Precision Alignment System with Sub-Micron Accuracy[J]. Chinese Journal of Lasers, 2012, 39(s1): 108013
Category: Measurement and metrology
Received: Feb. 25, 2012
Accepted: --
Published Online: Jun. 25, 2012
The Author Email: Jinlong Zhang (ZJL0310@163.com)