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Chinese Journal of Lasers, Volume. 39, Issue s1, 108013(2012)

Research on the Long Range Precision Alignment System with Sub-Micron Accuracy

Zhang Jinlong1、*, Lian Meilin1, Xu Hui1, and Lei Huahuan2
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    Zhang Jinlong, Lian Meilin, Xu Hui, Lei Huahuan. Research on the Long Range Precision Alignment System with Sub-Micron Accuracy[J]. Chinese Journal of Lasers, 2012, 39(s1): 108013

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    Paper Information

    Category: Measurement and metrology

    Received: Feb. 25, 2012

    Accepted: --

    Published Online: Jun. 25, 2012

    The Author Email: Jinlong Zhang (ZJL0310@163.com)

    DOI:10.3788/cjl201239.s108013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology