[1] 陈修国, 王才, 杨天娟. 集成电路制造在线光学测量检测技术： 现状、挑战与发展趋势[J]. 激光与光电子学进展, 59(2022).

     CHEN X G, WANG C, YANG T J et al. Inline optical measurement and inspection for IC manufacturing： state-of-the-art， challenges， and perspectives[J]. Laser & Optoelectronics Progress, 59(2022).

[2] WANG Z, ZHANG X, CHEN X et al. High-robustness autofocusing method in the microscope with laser-based arrayed spots[J]. Opt Express, 32, 4902-4915(2024).

[3] 王文琪, 刘巍, 刘洋. 基于双拟合优化的聚焦深度三维形貌测量方法[J]. 仪器仪表学报, 44, 30-38(2023).

     WANG W Q, LIU W, LIU Y et al. Shape from focus 3D topography measurement method based on dual-fitting optimization[J]. Chinese Journal of Scientific Instrument, 44, 30-38(2023).

[4] YANG C P, CHEN M H, ZHOU F F et al. Accurate and rapid auto-focus methods based on image quality assessment for telescope observation[J]. Applied Sciences, 10, 658(2020).

[5] 屈玉福, 浦昭邦, 赵慧洁. 调焦评价函数灵敏度的影响因素分析[J]. 光学学报, 25, 902-906(2005).

     QU Y F, PU ZH B, ZHAO H J et al. Influence factor analysis of sensitivity of focus criteria function[J]. Acta Optica Sinica, 25, 902-906(2005).

[6] WANG Q, SONG E M, XU X Y et al. Auto-focusing function for microscope image based on weighted neighborhood correlation[J]. Opt. Precision Eng., 16, 166-171(2008).

     王倩, 宋恩民, 许向阳. 基于加权邻域相关性的显微镜自动聚焦函数[J]. 光学 精密工程, 16, 166-171(2008).

[7] 梁敏华, 吴志勇, 陈涛. 采用最大灰度梯度法实现经纬仪自动调焦控制[J]. 光学 精密工程, 17, 3016-3021(2009).

     LIANG M H, WU ZH Y, CHEN T. Auto-focusing adjustment of theodolites by largest the gradient method[J]. Opt. Precision Eng., 17, 3016-3021(2009).

[8] DENG Q, WONG C O, SITHARAN R et al. Design of image intelligent focusing system based on improved SMD function and RBF algorithm[J]. PLoS One, 19(2024).

[9] 徐征, 何佳珩, 王彦琪. 面向显微视觉的端对端去模糊模型[J]. 光学 精密工程, 32, 3047-3058(2024).

     XU ZH, HE J H, WANG Y Q et al. End-to-end deblurring model for microscopic vision[J]. Opt. Precision Eng., 32, 3047-3058(2024).

[10] ZHOU L P, SUN ZH J, ZHANG Q. Auto-focusing and control of micro-vision system[J]. Opt. Precision Eng., 21, 807-812(2013).

     周丽平, 孙志峻, 张泉. 显微视觉系统的自动聚焦及控制[J]. 光学 精密工程, 21, 807-812(2013).

[11] XIONG R, GU N T, XU H Y. An auto-focusing evaluation function adapted to multi-directional gray gradient change[J]. Laser & Optoelectronics Progress, 59(2022).

     熊锐, 顾乃庭, 徐洪艳. 一种适应多方向灰度梯度变化的自动对焦评价函数[J]. 激光与光电子学进展, 59(2022).

[12] DONG Z Q, YANG Q F, HUANG X W et al. Three-dimensional microscopic measurement method based on gradient variance focus evaluation[J]. Laser & Optoelectronics Progress, 61, 1412003(2024).

     董正琼, 杨清锋, 黄贤文. 基于梯度方差聚焦评价的三维显微测量方法[J]. 激光与光电子学进展, 61, 1412003(2024).

[13] ZENG H F, HAN CH P, LI K et al. Improved gradient threshold image sharpness evaluation algorithm[J]. Laser & Optoelectronics Progress, 58, 2211001(2021).

     曾海飞, 韩昌佩, 李凯. 改进的梯度阈值图像清晰度评价算法[J]. 激光与光电子学进展, 58, 2211001(2021).

[14] 刘济豪, 卢荣胜, 张紫龙. 焦距测量中线纹清晰度评价函数的研究[J]. 光学学报, 43(2023).

     LIU J H, LU R SH, ZHANG Z L et al. Sharpness evaluation function for line patterns in focal length measurement[J]. Acta Optica Sinica, 43(2023).

[15] LEE H, CHANG H, SHIN H et al. Image-based overlay target design using a grating intersection[J]. Nanopatterning， Materials， and Metrology, 21, 19(2022).

[16] ADEL M, GHINOVKER M, GOLOVANEVSKY B et al. Optimized overlay metrology marks： theory and experiment[J]. IEEE Transactions on Semiconductor Manufacturing, 17, 166-179(2004).

[17] MINGHETTI B, BRUNNER T, ROBINSON C et al. Overlay characterization and matching of immersion photoclusters[C](2010).

[18] 李一鸣, 杨霖, 王晓浩. 光刻套刻误差测量技术[J]. 激光与光电子学进展, 59(2022).

     LI Y M, YANG L, WANG X H et al. Overlay metrology for lithography machine[J]. Laser & Optoelectronics Progress, 59(2022).

[19] 鲁沛昕, 杨开明, 鲁森. 用于晶圆键合的对准标记定位算法[J]. 仪器仪表学报, 42, 220-229(2021).

     LU P X, YANG K M, LU S et al. A high-precision positioning algorithm of alignment mark for wafer bonding[J]. Chinese Journal of Scientific Instrument, 42, 220-229(2021).

[20] LIN W T, WU Y X, XU L S et al. No-reference quality assessment for low-light image enhancement： Subjective and objective methods[J]. Displays, 78, 102432(2023).

[21] ZHANG C P, CAO W ZH, XU M G et al. Automatic focusing of micro-vision detection system of Mycobacterium tuberculosis smear[J]. Opt. Precision Eng., 26, 1480-1488(2018).

     张从鹏, 曹文政, 徐明刚. 结核杆菌涂片显微视觉检测系统的自动聚焦[J]. 光学 精密工程, 26, 1480-1488(2018).

[22] 翟永平, 周东翔, 刘云辉. 聚焦函数性能评价指标设计及最优函数选取[J]. 光学学报, 31, 234-244(2011).

     ZHAI Y P, ZHOU D X, LIU Y H et al. Design of evaluation index for auto-focusing function and optimal function selection[J]. Acta Optica Sinica, 31, 234-244(2011).