Photonics Research, Volume. 10, Issue 7, 1567(2022)

Sn content gradient GeSn with strain controlled for high performance GeSn mid-infrared photodetectors

Xiangquan Liu1,2, Jun Zheng1,2、*, Chaoqun Niu1,2, Taoran Liu1,2, Qinxing Huang1,2, Mingming Li1,2, Diandian Zhang1,2, Yaqing Pang1,2, Zhi Liu1,2, Yuhua Zuo1,2, and Buwen Cheng1,2
Author Affiliations
  • 1State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Xiangquan Liu, Jun Zheng, Chaoqun Niu, Taoran Liu, Qinxing Huang, Mingming Li, Diandian Zhang, Yaqing Pang, Zhi Liu, Yuhua Zuo, Buwen Cheng, "Sn content gradient GeSn with strain controlled for high performance GeSn mid-infrared photodetectors," Photonics Res. 10, 1567 (2022)

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    Paper Information

    Category: Silicon Photonics

    Received: Feb. 10, 2022

    Accepted: May. 17, 2022

    Published Online: Jun. 8, 2022

    The Author Email: Jun Zheng (zhengjun@semi.ac.cn)

    DOI:10.1364/PRJ.456000

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