Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Lingling Qiao; Wei Chu; Zhe Wang; Ya Cheng

doi:10.3788/AOS201939.0126012

Acta Optica Sinica, Volume. 39, Issue 1, 0126012(2019)

Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Lingling Qiao^1、*, Wei Chu^1,2、*, Zhe Wang^1,3, and Ya Cheng^1,2、*

¹ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China

³ School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China

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Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng. Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses[J]. Acta Optica Sinica, 2019, 39(1): 0126012

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Paper Information

Category: Physical Optics

Received: Aug. 30, 2018

Accepted: Oct. 16, 2018

Published Online: May. 10, 2019

The Author Email:

DOI:10.3788/AOS201939.0126012

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology