Acta Optica Sinica, Volume. 39, Issue 1, 0126012(2019)

Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Lingling Qiao1、*, Wei Chu1,2、*, Zhe Wang1,3, and Ya Cheng1,2、*
Author Affiliations
  • 1 State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2 The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China
  • 3 School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
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    Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng. Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses[J]. Acta Optica Sinica, 2019, 39(1): 0126012

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    Paper Information

    Category: Physical Optics

    Received: Aug. 30, 2018

    Accepted: Oct. 16, 2018

    Published Online: May. 10, 2019

    The Author Email:

    DOI:10.3788/AOS201939.0126012

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