Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1900005(2023)
Review of Anti-Vibration Technology in Phase-Shifting Interferometry
Fig. 1. Classification of anti-vibration technology in phase-shifting interferometry
Fig. 8. Receiving four parallel phase-shifting interferograms with single CCD[75]
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Liwei Zhang, Haobo Chen, Wenqing Sun, Jun Wang, Quanying Wu. Review of Anti-Vibration Technology in Phase-Shifting Interferometry[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900005
Category: Reviews
Received: Apr. 29, 2022
Accepted: Jun. 15, 2022
Published Online: Sep. 20, 2023
The Author Email: Wenqing Sun (sunwenqing@mail.usts.edu.cn)