Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1900005(2023)

Review of Anti-Vibration Technology in Phase-Shifting Interferometry

Liwei Zhang... Haobo Chen, Wenqing Sun*, Jun Wang and Quanying Wu |Show fewer author(s)
Author Affiliations
  • Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, Jiangsu , China
  • show less
    Figures & Tables(10)
    Classification of anti-vibration technology in phase-shifting interferometry
    Interference system with tunable semiconductor laser as light source[14]
    Flow chart of AIA algorithm
    Recovery phase error before and after vibration introduction[36]
    Phase-error pattern[40]
    Linear carrier frequency interferogram
    Parallel phase shifting based on beam spliter (BS)[73]
    Receiving four parallel phase-shifting interferograms with single CCD[75]
    Pixelated polarization mask[84]
    Air floating vibration isolation optical platform
    Tools

    Get Citation

    Copy Citation Text

    Liwei Zhang, Haobo Chen, Wenqing Sun, Jun Wang, Quanying Wu. Review of Anti-Vibration Technology in Phase-Shifting Interferometry[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900005

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Reviews

    Received: Apr. 29, 2022

    Accepted: Jun. 15, 2022

    Published Online: Sep. 20, 2023

    The Author Email: Wenqing Sun (sunwenqing@mail.usts.edu.cn)

    DOI:10.3788/LOP221473

    Topics