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Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1900005(2023)

Review of Anti-Vibration Technology in Phase-Shifting Interferometry

Liwei Zhang... Haobo Chen, Wenqing Sun*, Jun Wang and Quanying Wu |Show fewer author(s)
Author Affiliations
  • Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, Jiangsu , China
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    Article index updated: Aug. 2, 2025

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    Liwei Zhang, Haobo Chen, Wenqing Sun, Jun Wang, Quanying Wu. Review of Anti-Vibration Technology in Phase-Shifting Interferometry[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900005

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    Paper Information

    Category: Reviews

    Received: Apr. 29, 2022

    Accepted: Jun. 15, 2022

    Published Online: Sep. 20, 2023

    The Author Email: Wenqing Sun (sunwenqing@mail.usts.edu.cn)

    DOI:10.3788/LOP221473

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology