Chinese Journal of Lasers, Volume. 47, Issue 7, 701012(2020)

Development of GaN-Based Vertical-Cavity Surface-Emitting Lasers

Yang Tianrui, Xu Huan, Mei Yang, Xu Rongbin, Zhang Baoping, and Ying Leiying
Author Affiliations
  • School of Electronic Science and Engineering (National Model Microelectronics College), Xiamen University,Xiamen, Fujian 361005, China
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    Figures & Tables(8)
    Schematic illustrations of GaN-based VCSELs with three different configurations. (a) Fully epitaxial DBR[13]; (b) hybrid epitaxial/dielectric DBR[9]; (c) double dielectric DBR[19]
    Three typical structures of GaN-based VCSEL[94]. (a) Hybrid DBR structure with epitaxial nitride bottom DBR (structure A); (b) double dielectric DBR structure (structure B) fabricated by substrate transfer technique; (c) double dielectric DBR structure (structure C) fabricated by ELO technique
    Heat flux distributions in GaN VCSEL with different structures[94]. (a) Structure A with AlN/GaN DBR; (b) structure A with AlInN/GaN DBR; (c) structure B; (d) structure C
    Blue VCSEL array[41]. (a) Schematic of blue VCSEL array; (b) emission image of blue VCSEL array operating at below threshold
    Room-temperature CW lasing characteristic[54]. (a) Spectra of sample with a cavity length of 3041 nm at different currents; (b) spectra of sample with a cavity length of 2910 nm at different currents; (c) spectra of sample with a cavity length of 2652 nm at different currents. Inset: linewidth of the laising peak measured with a higher resolution
    Laser emission spectra at various injection currents measured at room temperature[55]
    EL spectra of the VCSEL measured at different currents(inset: linewidth of the laising peak measured with a higher resolution)[102-103]
    Emission spectra of the microcavity at room temperature[109]
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    Yang Tianrui, Xu Huan, Mei Yang, Xu Rongbin, Zhang Baoping, Ying Leiying. Development of GaN-Based Vertical-Cavity Surface-Emitting Lasers[J]. Chinese Journal of Lasers, 2020, 47(7): 701012

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    Paper Information

    Special Issue:

    Received: Jan. 6, 2020

    Accepted: --

    Published Online: Jul. 10, 2020

    The Author Email:

    DOI:10.3788/CJL202047.0701012

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