Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral-photoinhibition lithography

Dazhao Zhu; Liang Xu; Chenliang Ding; Zhenyao Yang; Yiwei Qiu; Chun Cao; Hongyang He; Jiawei Chen; Mengbo Tang; Lanxin Zhan; Xiaoyi Zhang; Qiuyuan Sun; Chengpeng Ma; Zhen Wei; Wenjie Liu; Xiang Fu; Cuifang Kuang; Haifeng Li; Xu Liu

doi:10.1117/1.AP.4.6.066002

Advanced Photonics, Volume. 4, Issue 6, 066002(2022)

Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral-photoinhibition lithography Author Presentation

Dazhao Zhu^1、†, Liang Xu², Chenliang Ding¹, Zhenyao Yang¹, Yiwei Qiu¹, Chun Cao¹, Hongyang He³, Jiawei Chen³, Mengbo Tang¹, Lanxin Zhan¹, Xiaoyi Zhang¹, Qiuyuan Sun¹, Chengpeng Ma¹, Zhen Wei¹, Wenjie Liu^1,2, Xiang Fu⁴, Cuifang Kuang^1,2、*, Haifeng Li^1,2, and Xu Liu^1,2、*

Author Affiliations

¹Zhejiang Lab, Research Center for Intelligent Chips and Devices, Hangzhou, China

²Zhejiang University, College of Optical Science and Engineering, State Key Laboratory of Modern Optical Instrumentation, Hangzhou, China

³Zhejiang University, College of Control Science and Engineering, State Key Laboratory of Industrial Control Technology, Hangzhou, China

⁴Zhejiang Lab, Research Center for Humanoid Sensing, Zhejiang Lab, Hangzhou, China

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Dazhao Zhu, Liang Xu, Chenliang Ding, Zhenyao Yang, Yiwei Qiu, Chun Cao, Hongyang He, Jiawei Chen, Mengbo Tang, Lanxin Zhan, Xiaoyi Zhang, Qiuyuan Sun, Chengpeng Ma, Zhen Wei, Wenjie Liu, Xiang Fu, Cuifang Kuang, Haifeng Li, Xu Liu, "Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral-photoinhibition lithography," Adv. Photon. 4, 066002 (2022)

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Paper Information

Category: Research Articles

Received: Aug. 21, 2022

Accepted: Nov. 1, 2022

Posted: Nov. 2, 2022

Published Online: Nov. 25, 2022

The Author Email: Kuang Cuifang (cfkuang@zju.edu.cn), Liu Xu (liuxu@zju.edu.cn)

DOI:10.1117/1.AP.4.6.066002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology