Fig. 1. Proposed P3L system and focal spots: (a) schematic of the P3L system and (b) physical arrangement with eight modules. (c), (d) Focal spots located near the x−y and y−z planes, respectively. The light blue and green spots were generated by the 532-nm beam, and the purple and red spots were produced by the 780-nm beam, forming two combinations. The combination of light blue and purple spots was named channel 1, and the other combination was named channel 2. (c) and (d) share the same scale bar.

Fig. 2. Two-dimensional feature size verification experiment results. (a) Feature size versus inhibition beam intensity under excitation beam exposure with different powers. (b) SEM image of the nanowire obtained at the point in the red box in (a). After the PPI is turned on, the line width is compressed from 138.8 to 39.8 nm. Scale bar: 100 nm.

Fig. 3. Bit-pattern-printing results. (a) Full-view SEM image of the printed pattern. The pattern shows two lines of text and is pixelated. Top line: Chinese words, printed by channel 1 with PPI; bottom line: English words (translation of the text in the top line), printed by channel 2 without PPI. Scale bar: 2μm. (b), (c) Enlarged views of the yellow and blue boxes in (a), respectively; the horizontal and vertical pitches of the bits are 200 nm. Scale bars: 1μm.

Fig. 4. Metamaterial cubic-unit printing results: (a) SEM image of a 2×2×2 unit cell, (b) top view of (a), (c) zoomed-in view of the yellow box in (a), (d) SEM image of a 3×3×3 unit cell, (e) top view of (d), and (f) zoomed-in view of the yellow box in (d). In (b) and (c), the portions corresponding to the light-blue stripes were printed by channel 1, and those indicated by the dark-red stripes were printed by channel 2. Scale bars: 50μm.

Fig. 5. Oblique-view SEM images of 3D nanostructures parallel-printed using two spots. (a) Two cubical box frames, (b) periodic structure: hexagonal fence, (c) wire structure: nanophotonic wires, and (d) spherical structure: buckyball model. Scale bars: 10μm.