Acta Optica Sinica, Volume. 23, Issue 11, 1354(2003)

Interferometric Measurement of the Line Density of Varied-Line-Space Gratings

[in Chinese]1,2、*, [in Chinese]1, [in Chinese]1, [in Chinese]3, [in Chinese]2, [in Chinese]1, [in Chinese]1, and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(6)

    [1] [1] Namioka T, Koike M. Aspheric wave-front recording optics for holographic gratings. Appl. Opt., 1995, 34(13): 2180~2186

    [3] [3] Hettrick M C, Bowyer S. Varied line-space gratings: new designs for use in grazing incidence spectrometers. Appl. Opt., 1983, 22(24): 3921~3924

    [5] [5] Singh S. Diffraction gratings: aberrations and application. Opt. Laser Technol., 1999, 31: 195~218

    [6] [6] Cocco D, Sergo R, Sostero G et al.. High precision measurements of the groove density of diffraction gratings. Conf erence on Sof t X-Ray and EUV Imaging Systems, Proc. SPIE, 2000, 4146: 143~150

    [7] [7] Amemiya K, Kitajima Y, Yamamoto Yet al.. Fabrication of a varied-line-spacing plane grating with aspheric wavefront holographic recording for a new grazing incidence monochromator at the photon factory. Proc. SPIE, 1997, 3150: 171~182

    [10] [10] Deville B, Bonnemason F. Holographically recorded, ion etched variable line space gratings. Proc. SPIE, 1998,3450: 24~355

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Interferometric Measurement of the Line Density of Varied-Line-Space Gratings[J]. Acta Optica Sinica, 2003, 23(11): 1354

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    Paper Information

    Category: Physical Optics

    Received: Jul. 8, 2002

    Accepted: --

    Published Online: Jun. 27, 2006

    The Author Email: (readsword@263.net)

    DOI:

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