Acta Optica Sinica, Volume. 23, Issue 11, 1354(2003)
Interferometric Measurement of the Line Density of Varied-Line-Space Gratings
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Interferometric Measurement of the Line Density of Varied-Line-Space Gratings[J]. Acta Optica Sinica, 2003, 23(11): 1354