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Acta Optica Sinica, Volume. 23, Issue 11, 1354(2003)

Interferometric Measurement of the Line Density of Varied-Line-Space Gratings

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Interferometric Measurement of the Line Density of Varied-Line-Space Gratings[J]. Acta Optica Sinica, 2003, 23(11): 1354

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    Paper Information

    Category: Physical Optics

    Received: Jul. 8, 2002

    Accepted: --

    Published Online: Jun. 27, 2006

    The Author Email: (readsword@263.net)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology