Adaptive gradient-based source and mask co-optimization with process awareness

Yijiang Shen; Fei Peng; Xiaoyan Huang; Zhenrong Zhang

doi:10.3788/COL201917.121102

Chinese Optics Letters, Volume. 17, Issue 12, 121102(2019)

Adaptive gradient-based source and mask co-optimization with process awareness

Yijiang Shen^1、*, Fei Peng¹, Xiaoyan Huang¹, and Zhenrong Zhang²

Author Affiliations

¹School of Automation, Guangdong University of Technology, Mega Education Center South, Guangzhou 510006, China

²Guangxi Key Laboratory of Multimedia Communications and Network Technology, School of Computer, Electronics and Information, Guangxi University, Nanning 530004, China

show less

Cited By

Article index updated: May. 3, 2024

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 20 article(s) from Web of Science.

The article is cited by 4 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

Yijiang Shen, Fei Peng, Xiaoyan Huang, Zhenrong Zhang, "Adaptive gradient-based source and mask co-optimization with process awareness," Chin. Opt. Lett. 17, 121102 (2019)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Imaging Systems

Received: Apr. 24, 2019

Accepted: Aug. 6, 2019

Published Online: Dec. 3, 2019

The Author Email: Yijiang Shen (yjshen@gdut.edu.cn)

DOI:10.3788/COL201917.121102

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology