Chinese Journal of Lasers, Volume. 48, Issue 13, 1305002(2021)

Structure Design of Compact Piezoelectric Fast Steering Mirror with High Performance

Ziye Zhou1...2,3, Zhongyi Feng1,2, Linhai Huang1,2, and Hao Xian12,* |Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    References(12)

    [1] Park W H, Corredor A, Cho M et al. Flexure design development for a fast steering mirror[J]. Proceedings of SPIE, 8836, 88360W(2013).

    [2] Janssen H, Teuwen M, Navarro R et al. Design and prototype performance of an innovative cryogenic tip-tilt mirror[J]. Proceedings of SPIE, 7739, 77394A(2010).

    [5] Schlarp J, Csencsics E, Schitter G. Optical scanning of laser line sensors for 3D imaging[J]. Applied Optics, 57, 5242-5248(2018).

    [6] Chen N H, Potsaid B, Wen J T et al. Modeling and control of a fast steering mirror in imaging applications[C]. //2010 IEEE International Conference on Automation Science and Engineering, August 21-24, 2010, Toronto, ON, Canada., 27-32(2010).

    [7] Park J H, Lee H S, Lee J H et al. Design of a piezoelectric-driven tilt mirror for a fast laser scanner[J]. Japanese Journal of Applied Physics, 51, 09MD14(2012).

    [8] Wang H K, Zhang G Y, Guo L H et al. High performance fast-steering mirror for beam control of vehicular high energy laser system[J]. Optics and Precision Engineering, 21, 336-341(2013).

    [9] Xu X H, Gao Y G, Yang H B et al. Large-diameter fast steering mirror on rigid support technology for dynamic platform[J]. Optics and Precision Engineering, 22, 117-124(2014).

    [10] Zhou Z Y, Gao Y G, Shao S et al. Design of fast steering mirror using flexible hinge[J]. Optics and Precision Engineering, 22, 1547-1554(2014).

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    Ziye Zhou, Zhongyi Feng, Linhai Huang, Hao Xian. Structure Design of Compact Piezoelectric Fast Steering Mirror with High Performance[J]. Chinese Journal of Lasers, 2021, 48(13): 1305002

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    Paper Information

    Category: beam transmission and control

    Received: Dec. 8, 2020

    Accepted: Jan. 20, 2021

    Published Online: Jun. 15, 2021

    The Author Email: Xian Hao (xianhao@ioe.ac.cn)

    DOI:10.3788/CJL202148.1305002

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