Structure Design of Compact Piezoelectric Fast Steering Mirror with High Performance

Ziye Zhou; Zhongyi Feng; Linhai Huang; Hao Xian

doi:10.3788/CJL202148.1305002

Chinese Journal of Lasers, Volume. 48, Issue 13, 1305002(2021)

Structure Design of Compact Piezoelectric Fast Steering Mirror with High Performance

Ziye Zhou^1,2,3, Zhongyi Feng^1,2, Linhai Huang^1,2, and Hao Xian^1,2、*

Author Affiliations

¹Key Laboratory of Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

²Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(9)

Fig. 1. PCSA for the compact fast steering mirror. (a)Photograph of the PCSA;(b)stroke response of PCSA

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Fig. 2. Structure diagram of compacted FSM. (a) Distribution of PCSA; (b) working principle of compacted FSM deflecting around Y axis; (c) photograph of the compacted FSM

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Fig. 3. Static lumped stiffness model of the compacted FSM

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Fig. 4. Dynamic analysis model of the compact FSM

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Fig. 5. Photograph of compacted FSM experimental measurement system

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Fig. 6. Relationship between the tilt angle and the time of the FSM

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Fig. 7. Resonance frequency test results of the compact FSM. (a) Result along X direction without mirror; (b) result along Y direction without mirror; (c) result along X direction with mirror; (d) result along Y direction with mirror

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Table 1. Geometrical parameters of the FSM
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Table 1. Geometrical parameters of the FSM
Parameter Value
d₁ /mm 7
d₂ /mm 15
d₃ /mm 14

Table 2. Parameters of components of the FSM

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Table 2. Parameters of components of the FSM

Parameter	Value
Stiffness of hinge K_A /(N·m·rad^-1)	90
Stiffness of hinge K_B /(N·m·rad^-1)	18
Stiffness of PCSA K_p /(N·m^-1)	2.1×10⁷
Rotary inertia of rod AB I_AB /(kg·m²)	8.16×10^-6
m_p /kg	0.046
Rotary inertia of stage with mirrorI_m /(kg·m²)	5.37×10^-5
Rotary inertia of stage without mirrorI'_m /(kg·m²)	2.02×10^-6

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Ziye Zhou, Zhongyi Feng, Linhai Huang, Hao Xian. Structure Design of Compact Piezoelectric Fast Steering Mirror with High Performance[J]. Chinese Journal of Lasers, 2021, 48(13): 1305002

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