Fig. 1. Working principle diagram of galvanometer laser scanning measurement system

Fig. 2. Structure diagram of galvanometer laser scanning measurement system

Fig. 3. Connection diagram of coupling and galvanometer lens. (a) Isometric view; (b) front view

Fig. 4. Schematic of calibration device. (a) Side view; (b) isometric view

Fig. 5. World coordinate system on upper and bottom calibration plates

Fig. 6. Schematic of system calibration

Fig. 7. Schematic of model of galvanometer scanning measurement system

Fig. 8. Error transfer function curves of Δφ in different directions. (a) X axis direction; (b) Z axis direction

Fig. 9. Error transfer function curves of Δp in different directions. (a) X axis direction; (b) Z axis direction

Fig. 10. Effect of surface properties on Δp value. (a) Schematic of obliquely irradiated object with laser; (b) offset curves between gray centroid and geometric center

Fig. 11. Schematic of system installation error. (a) Light plane intersects axis of rotation; (b) light plane is parallel to axis of rotation

Fig. 12. Calibration device for double checkerboard

Fig. 13. Fitting results of light plane in camera coordinate system and its partial enlarged view

Fig. 14. Angle error curves of adjacent light planes

Fig. 15. Calibration curves of optical plane rotation error

Fig. 16. Three-dimensional point cloud of checkerboard flat panel. (a) Original image; (b) after error compensation

Fig. 17. Ceramic standard ball. (a) Physical image; (b) 3D point cloud

Fig. 18. Error curves under different conditions. (a) Standard ball diameter; (b) ball center distance

Fig. 19. Measurement results of 3D printed models and plaster models. (a) Real models; (b) 3D point clouds; (c) front views; (d) side views