Error Analysis and Compensation of Galvanometer Laser Scanning Measurement System

Teng Wang; Shuming Yang; Shusheng Li; Ye Yuan; Pengyu Hu; Tao Liu; Shuhai Jia

doi:10.3788/AOS202040.2315001

Acta Optica Sinica, Volume. 40, Issue 23, 2315001(2020)

Error Analysis and Compensation of Galvanometer Laser Scanning Measurement System

Teng Wang, Shuming Yang^*, Shusheng Li, Ye Yuan, Pengyu Hu, Tao Liu, and Shuhai Jia

Author Affiliations

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China

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Teng Wang, Shuming Yang, Shusheng Li, Ye Yuan, Pengyu Hu, Tao Liu, Shuhai Jia. Error Analysis and Compensation of Galvanometer Laser Scanning Measurement System[J]. Acta Optica Sinica, 2020, 40(23): 2315001

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Paper Information

Category: Machine Vision

Received: Jul. 13, 2020

Accepted: Aug. 7, 2020

Published Online: Dec. 1, 2020

The Author Email: Yang Shuming (shuming.yang@mail.xjtu.eud.cn)

DOI:10.3788/AOS202040.2315001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology