Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Laser & Optoelectronics Progress, Volume. 53, Issue 8, 81201(2016)

Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens

Peng Haifeng1、*, Yu Xinfeng1, and Qin Shuo2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (19)
    Cited By (1)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    Peng Haifeng, Yu Xinfeng, Qin Shuo. Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens[J]. Laser & Optoelectronics Progress, 2016, 53(8): 81201

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 1, 2016

    Accepted: --

    Published Online: Aug. 11, 2016

    The Author Email: Peng Haifeng (kedapeng1986@163.com)

    DOI:10.3788/lop53.081201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology