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Laser & Optoelectronics Progress, Volume. 53, Issue 8, 81201(2016)

Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens

Peng Haifeng1、*, Yu Xinfeng1, and Qin Shuo2
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  • 1[in Chinese]
  • 2[in Chinese]
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    Article index updated: Sep. 16, 2025

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    Peng Haifeng, Yu Xinfeng, Qin Shuo. Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens[J]. Laser & Optoelectronics Progress, 2016, 53(8): 81201

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 1, 2016

    Accepted: --

    Published Online: Aug. 11, 2016

    The Author Email: Peng Haifeng (kedapeng1986@163.com)

    DOI:10.3788/lop53.081201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology