[1] [1] A Shamir, A A Ishaaya. Large volume ablation of sapphire with ultra-short laser pulses[J]. Applied Surface Science, 2013, 270: 763-766.

[2] [2] Gao Huiying. The trends and the state of China′s LED substrate[J].Equipment for Electronic Products Manufacturing, 2011, 40(7): 1-6.

[3] [3] L Torrisi, A Borrielli, D Margarone. Study on the ablation threshold induced by pulsed lasers at different wavelengths[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2007, 255(2): 373-379.

[4] [4] Li Changqing, Wu Wanliang, Zuo Hongbo, et al.. Analysis of fracture surface for sapphire cut by long pulse laser[J]. Journal of Synthetic Crystals, 2010, (4): 997-1001.

[5] [5] J Han, C Li, M Zhang, et al.. An investigation of long pulsed laser induced damage in sapphire[J]. Optics & Laser Technology, 2009, 41(3): 339-344.

[6] [6] R S Patel, A Tamhankar, T Edwards. Diode-pumped solid-state UV lasers improve LED sapphire wafer scribing[J]. Photonics Spectra, 2010, 44(10): 46-48

[7] [7] A Tamhankar, R Patel. Optimization of UV laser scribing process for light emitting diode sapphire wafers[J]. Journal of Laser Applications, 2011, 23(3): 032001.

[8] [8] Huang Huan, Yang Lijun, Wang Maolu, et al.. The experimental research of sapphire dicing by a UV laser[J]. Electromachining & Mould, 2009, (5): 35-38.

[9] [9] Y Dai, G Xu, J Cui, et al.. Laser micro-structuring of sapphire wafer and fiber[C]. SPIE, 2010, 7590: 75900.

[10] [10] O Uteza, B Bussière, F Canova, et al.. Laser-induced damage threshold of sapphire in nanosecond, picosecond and femtosecond regimes[J]. Applied Surface Science, 2007, 254(4): 799-803.

[11] [11] Yang Huan, Huang Shan, Duan Jun, et al.. Contrastive study on laser ablation of single-crystal silicon by 1030 nm femtosecond laser and 355 nm nanosecond laser[J]. Chinese J Lasers, 2013, 40(1): 0103003.

[12] [12] M V Allmen, A Blatter. Laser-Beam Interactions with Materials[M]. Berlin: Springer, 1995.

[13] [13] H S Carslaw, J C Jaeger. Conduction of Heat in Solids[M]. Oxford: Oxford University Press, 1959.

[14] [14] Rothenberg Joshua E, Koren Gad. Laser produced plasma in crystalline a-Al2O3 and aluminum metal[J]. Appl Phys Lett, 1984, 44(7): 664-666.

[15] [15] D M Zhang, X Y Tan, Z H Li, et al.. Thermal regime and effect studying on the ablation process of thin films prepared by nanosecond pulsed laser[J]. Physica B, 2005, 357(3): 348-55.

[16] [16] Q M Lu, S Mao, X Mao. Delayed phase explosion during high power nanosecond laser ablation of silicon[J]. Appl Phys Lett, 2001, 80(17): 3072-3074.

[17] [17] D Ashkenasi, A Rosenfeld, H Varel, et al.. Laser processing of sapphire with picosecond and sub-picosecond pulses[J]. Appl Surf Sci, 1997, 120(1-2): 65-80.

[18] [18] Li Weite, Huang Baohai. Theoretical Analysis and Application of Thermal Stress[M]. Beijing: China Electric Power Press, 2004. 64-65.