Chinese Journal of Lasers, Volume. 40, Issue 12, 1203010(2013)

Study on Scribing of Sapphire Substrate by Pulsed Green Laser Irradiation

Xie Xiaozhu1、*, Huang Xiandong1, Chen Weifang2,3, Wei Xin1, Hu Wei1, and Che Ronghong1
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    Xie Xiaozhu, Huang Xiandong, Chen Weifang, Wei Xin, Hu Wei, Che Ronghong. Study on Scribing of Sapphire Substrate by Pulsed Green Laser Irradiation[J]. Chinese Journal of Lasers, 2013, 40(12): 1203010

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    Paper Information

    Category: laser manufacturing

    Received: Jun. 18, 2013

    Accepted: --

    Published Online: Dec. 5, 2013

    The Author Email: Xie Xiaozhu (xiaozhuxiegdut@gmail.com)

    DOI:10.3788/cjl201340.1203010

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