Microelectronics, Volume. 54, Issue 1, 110(2024)
An U-Shaped High-K Dielectric Film Trench Gate Vertical Field Plate LDMOS
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QIAN Tu, DAI Hongli, ZHOU Chunxing, CHEN Weiyu. An U-Shaped High-K Dielectric Film Trench Gate Vertical Field Plate LDMOS[J]. Microelectronics, 2024, 54(1): 110
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Received: Aug. 4, 2023
Accepted: --
Published Online: Aug. 7, 2024
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