Reconstruction of Wavefronts with Arbitrary Aperture Using Multi-Directional Difference Zernike Polynomial Fitting

Tao Wang; Xiting Han; Yanqiu Li; Ke Liu

doi:10.3788/AOS241882

Acta Optica Sinica, Volume. 45, Issue 7, 0726001(2025)

Reconstruction of Wavefronts with Arbitrary Aperture Using Multi-Directional Difference Zernike Polynomial Fitting

Tao Wang, Xiting Han, Yanqiu Li, and Ke Liu^*

Key Laboratory of Photoelectronic Imaging Technology and Systems, Ministry of Education, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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References(6)

[1] Li M Y, Li D H, Zhang C et al. Modal wavefront reconstruction from slope measurements for rectangular apertures[J]. Journal of the Optical Society of America A, 32, 1916-1921(2015).

[2] Xiang H B. Research on wavefront reconstrution based on shearing interference[D], 1-4(2010).

[3] Mahajan V N, Dai G M. Orthonormal polynomials in wavefront analysis: analytical solution[J]. Journal of the Optical Society of America A, 24, 2994-3016(2007).

[4] Gardner J P, Mather J C, Clampin M et al. The James Webb space telescope[J]. Space Science Reviews, 123, 485-606(2006).

[5] Liu Y, Li Y Q, Cao Z. Design of anamorphic magnification high-numerical aperture objective for extreme ultraviolet lithography by curvatures combination method[J]. Applied Optics, 55, 4917-4923(2016).

[6] Lakshminarayanan V, Fleck A. Zernike polynomials: a guide[J]. Journal of Modern Optics, 58, 545-561(2011).

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Tao Wang, Xiting Han, Yanqiu Li, Ke Liu. Reconstruction of Wavefronts with Arbitrary Aperture Using Multi-Directional Difference Zernike Polynomial Fitting[J]. Acta Optica Sinica, 2025, 45(7): 0726001

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Paper Information

Category: Physical Optics

Received: Dec. 11, 2024

Accepted: Jan. 20, 2025

Published Online: Apr. 27, 2025

The Author Email: Ke Liu (liuke@bit.edu.cn)

DOI:10.3788/AOS241882

CSTR:32393.14.AOS241882

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology