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Chinese Journal of Lasers, Volume. 40, Issue 9, 908001(2013)

Far-Field Multi-Parameter Measurement of Diffractive Optical Element for Pupil Shaping in Lithography System

Hu Zhonghua1,2、*, Zhu Jing1, Yang Baoxi1,2, Pen Xuefeng1, Zeng Aijun1,2, and Huang Huijie1,2
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    Article index updated: Mar. 10, 2025

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    Hu Zhonghua, Zhu Jing, Yang Baoxi, Pen Xuefeng, Zeng Aijun, Huang Huijie. Far-Field Multi-Parameter Measurement of Diffractive Optical Element for Pupil Shaping in Lithography System[J]. Chinese Journal of Lasers, 2013, 40(9): 908001

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    Paper Information

    Category: measurement and metrology

    Received: Mar. 28, 2013

    Accepted: --

    Published Online: Aug. 12, 2013

    The Author Email: Zhonghua Hu (huzhonghua@siom.ac.cn)

    DOI:10.3788/cjl201340.0908001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology