Researching | Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating

Laser & Optoelectronics Progress, Volume. 62, Issue 9, 0912003(2025)

Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating

Yuanjun Wu, Cheng Pan, and Zhanhua Huang^*

Author Affiliations

School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China

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References (16)

Paper Information

References(16)

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[5] Liu Z Y, Pang Y J, Pan C et al. Design of a uniform-illumination binocular waveguide display with diffraction gratings and freeform optics[J]. Optics Express, 25, 30720-30731(2017).

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[7] Tan W, Tang Z H, Xiao G X et al. Calibrate the non-orthogonal error of AFM with two-dimensional self-traceable grating[J]. Ultramicroscopy, 249, 113734(2023).

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[9] Crostack H A, Fischer G, Soppa E et al. Localization of strain in metal matrix composites studied by a scanning electron microscope-based grating method[J]. Journal of Microscopy, 201, 171-178(2001).

[10] Graf U U, Jaffe D T, Kim E J et al. Fabrication and evaluation of an etched infrared diffraction grating[J]. Applied Optics, 33, 96-102(1994).

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Yuanjun Wu, Cheng Pan, Zhanhua Huang. Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating[J]. Laser & Optoelectronics Progress, 2025, 62(9): 0912003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Aug. 13, 2024

Accepted: Oct. 17, 2024

Published Online: Apr. 18, 2025

The Author Email: Zhanhua Huang (Zhanhua@tju.edu.cn)

DOI:10.3788/LOP241831

CSTR:32186.14.LOP241831

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology