Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating

Yuanjun Wu; Cheng Pan; Zhanhua Huang

doi:10.3788/LOP241831

Laser & Optoelectronics Progress, Volume. 62, Issue 9, 0912003(2025)

Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating

Yuanjun Wu, Cheng Pan, and Zhanhua Huang^*

Author Affiliations

School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China

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Figures & Tables(9)

$Schematic diagram of measuring grating period using Littrow diffraction method$

Fig. 1. Schematic diagram of measuring grating period using Littrow diffraction method

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Fig. 2. Schematic diagram of pitch angle

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Fig. 3. Schematic diagram of roll angle

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Fig. 4. Flowchart for calculating the center of light spot

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Fig. 5. Schematic diagram for calculating the rotation angle of null position

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Fig. 6. Grating sample manufactured by nanoimprint

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Fig. 7. Schematic diagram of sampling for grating period measurement

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Fig. 8. Light spot center data of area 3. (a) Normal incidence; (b) Littrow condition

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Table 1. Measurement results of grating period
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Table 1. Measurement results of grating period
Area Period /nm Area Period /nm
1 415.10 4 415.18
2 415.15 5 415.10
3 415.09

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Yuanjun Wu, Cheng Pan, Zhanhua Huang. Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating[J]. Laser & Optoelectronics Progress, 2025, 62(9): 0912003

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