Laser & Optoelectronics Progress, Volume. 62, Issue 9, 0912003(2025)

Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating

Yuanjun Wu, Cheng Pan, and Zhanhua Huang*
Author Affiliations
  • School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
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    Diffraction optical waveguides have the advantages of compact size and light weight for augmented reality displays. The period of subwavelength gratings on the surface of grating waveguides significantly affects imaging quality, making it essential to achieve fast and accurate measurements of grating periods. The Littrow diffraction method has the advantages of low cost and non-destructive properties. However, it requires precise alignment of the grating sample, necessitating multiple adjustments prior to measurement, which hampers rapid evaluation. To address this problem, this study analyzes the diffraction characteristics of misaligned gratings and proposes an image processing-based method to calculate the misalignment angle and correct measurement errors. The proposed method enables accurate measurement of the grating period under conditions in which the grating pose is not strictly aligned, thereby enhancing measurement efficiency, it is expected to achieve facilitating rapid detection of augmented reality grating waveguides.

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    Yuanjun Wu, Cheng Pan, Zhanhua Huang. Research on a Rapid Measurement Method for Grating Period in Subwavelength Grating[J]. Laser & Optoelectronics Progress, 2025, 62(9): 0912003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Aug. 13, 2024

    Accepted: Oct. 17, 2024

    Published Online: Apr. 18, 2025

    The Author Email: Zhanhua Huang (Zhanhua@tju.edu.cn)

    DOI:10.3788/LOP241831

    CSTR:32186.14.LOP241831

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