Spectroscopy and Spectral Analysis, Volume. 36, Issue 2, 326(2016)
The Influence of Deposition Pressure on the Properties of Hydrogenated Amorphous Silicon Thin Films
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YUAN Jun-bao, YANG Wen, CHEN Xiao-bo, YANG Pei-zhi, SONG Zhao-ning. The Influence of Deposition Pressure on the Properties of Hydrogenated Amorphous Silicon Thin Films[J]. Spectroscopy and Spectral Analysis, 2016, 36(2): 326
Received: Nov. 17, 2014
Accepted: --
Published Online: Dec. 9, 2016
The Author Email: YUAN Jun-bao (junbao_y@163.com)