Spectroscopy and Spectral Analysis, Volume. 36, Issue 2, 326(2016)

The Influence of Deposition Pressure on the Properties of Hydrogenated Amorphous Silicon Thin Films

YUAN Jun-bao1、*, YANG Wen1, CHEN Xiao-bo1,2, YANG Pei-zhi1, and SONG Zhao-ning3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3Department of Physics and Astronomy, University of Toledo, Toledo OH 43606, USA
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    YUAN Jun-bao, YANG Wen, CHEN Xiao-bo, YANG Pei-zhi, SONG Zhao-ning. The Influence of Deposition Pressure on the Properties of Hydrogenated Amorphous Silicon Thin Films[J]. Spectroscopy and Spectral Analysis, 2016, 36(2): 326

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    Paper Information

    Received: Nov. 17, 2014

    Accepted: --

    Published Online: Dec. 9, 2016

    The Author Email: YUAN Jun-bao (junbao_y@163.com)

    DOI:10.3964/j.issn.1000-0593(2016)02-0326-05

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