The Influence of Deposition Pressure on the Properties of Hydrogenated Amorphous Silicon Thin Films

YUAN Jun-bao; YANG Wen; CHEN Xiao-bo; YANG Pei-zhi; SONG Zhao-ning

doi:10.3964/j.issn.1000-0593(2016)02-0326-05

Spectroscopy and Spectral Analysis, Volume. 36, Issue 2, 326(2016)

The Influence of Deposition Pressure on the Properties of Hydrogenated Amorphous Silicon Thin Films

YUAN Jun-bao^1、*, YANG Wen¹, CHEN Xiao-bo^1,2, YANG Pei-zhi¹, and SONG Zhao-ning³

Author Affiliations

¹[in Chinese]

²[in Chinese]

³Department of Physics and Astronomy, University of Toledo, Toledo OH 43606, USA

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YUAN Jun-bao, YANG Wen, CHEN Xiao-bo, YANG Pei-zhi, SONG Zhao-ning. The Influence of Deposition Pressure on the Properties of Hydrogenated Amorphous Silicon Thin Films[J]. Spectroscopy and Spectral Analysis, 2016, 36(2): 326

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Paper Information

Received: Nov. 17, 2014

Accepted: --

Published Online: Dec. 9, 2016

The Author Email: YUAN Jun-bao (junbao_y@163.com)

DOI:10.3964/j.issn.1000-0593(2016)02-0326-05

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