Optics and Precision Engineering, Volume. 19, Issue 9, 2123(2011)

Development of decoupled z-axis micromachined gyroscope

ZHOU Hao1,2、*, SU Wei1, LIU Xian-xue1, and TANG Hai-lin1
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    ZHOU Hao, SU Wei, LIU Xian-xue, TANG Hai-lin. Development of decoupled z-axis micromachined gyroscope[J]. Optics and Precision Engineering, 2011, 19(9): 2123

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    Paper Information

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    Received: Oct. 27, 2010

    Accepted: --

    Published Online: Oct. 11, 2011

    The Author Email: ZHOU Hao (chinamems@163.com)

    DOI:10.3788/ope.20111909.2123

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