[1] Cocco D, Cutler G, Sanchez del Rio M et al. Wavefront preserving X-ray optics for Synchrotron and Free Electron Laser photon beam transport systems[J]. Physics Reports, 974, 1-40(2022).

[2] Tong Y J, Liu F, Fan J D et al. Effect of optics contamination on X-ray free-electron laser beam quality[J]. Acta Optica Sinica, 42, 1134006(2022).

[3] Takacs P Z, Qian S N, Kester T et al. Large-mirror figure measurement by optical profilometry techniques[J]. Proceedings of SPIE, 3782, 266-274(1999).

[4] Assoufid L, Rommeveaux A, Ohashi H et al. Results of X-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories[J]. Proceedings of SPIE, 5921, 59210J(2005).

[5] Erko A I, Idir M, Krist T et al[M]. Modern developments in X-ray and neutron optics, 181-190(2008).

[6] Siewert F, Buchheim J, Boutet S et al. Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry[J]. Optics Express, 20, 4525-4536(2012).

[7] Zhang S, Hou X. Research progress of high-precision surface metrology of a K-B mirror[J]. Chinese Optics, 13, 660-675(2020).

[8] de Groot P J. A review of selected topics in interferometric optical metrology[J]. Reports on Progress in Physics, 82, 056101(2019).

[9] da Silva M B, Alcock S G, Nistea I T et al. A Fizeau interferometry stitching system to characterize X-ray mirrors with sub-nanometre errors[J]. Optics and Lasers in Engineering, 161, 107192(2023).

[10] Zhou G, Wang J Z, Lei W Z et al. Stitching interferometry for long X-ray mirrors with lateral multi-shift-based absolute calibration[J]. Applied Optics, 63, 2086-2094(2024).

[11] Wang H Y, Jiang S K, Wei S et al. Study on high precision flexible hinge rotation stage for stitching interference system of mirror[J]. Laser & Optoelectronics Progress, 62, 0712003(2025).

[12] Zong Y, Sun S Y, Shi X Y et al. Aspheric subaperture stitching interferometry with single-wedge variable compensation[J]. Acta Optica Sinica, 44, 2012001(2024).

[13] Hao Q, Liu Y M, Hu Y et al. Interferometric measurement of optical aspheric surface form error and parameter error[J]. Acta Optica Sinica, 43, 1522003(2023).

[14] Thurner K, Quacquarelli F P, Braun P F et al. Fiber-based distance sensing interferometry[J]. Applied Optics, 54, 3051-3063(2015).

[15] Smith D T, Pratt J R, Howard L P. A fiber-optic interferometer with subpicometer resolution for dc and low-frequency displacement measurement[J]. Review of Scientific Instruments, 80, 035105(2009).

[16] Gao W, Yokoyama J, Kojima H et al. Precision measurement of cylinder straightness using a scanning multi-probe system[J]. Precision Engineering, 26, 279-288(2002).

[17] Elster C, Weingärtner I, Schulz M. Coupled distance sensor systems for high-accuracy topography measurement: accounting for scanning stage and systematic sensor errors[J]. Precision Engineering, 30, 32-38(2006).

[18] Schulz M, Elster C. Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution[J]. Optical Engineering, 45, 060503(2006).

[19] Takei Y, Mimura H. Development of surface profiler for master mandrel of X-ray ellipsoidal mirror[J]. Proceedings of SPIE, 9962, 99620C(2016).

[20] Kume T, Takei Y, Egawa S et al. Three-dimensional shape measurement for X-ray ellipsoidal mirror[J]. Proceedings of SPIE, 10385, 103850O(2017).

[21] Mimura H, Takei Y, Kume T et al. Fabrication of a precise ellipsoidal mirror for soft X-ray nanofocusing[J]. Review of Scientific Instruments, 89, 093104(2018).

[22] Nakamori H, Kanaoka M. Performance evaluation of JTEC coordinate measuring machine[J]. Proceeding of SPIE, 11492, 114920A(2020).

[23] Murray R M, Li Z X, Sastry S S[M]. A mathematical introduction to robotic manipulation, 19-33(1994).