Fig. 1. Measurement of surface profile with interferometric displacement sensor

Fig. 2. Schematic diagram for measurement of mirror surface profile with three interferometric displacement sensors

Fig. 3. Motion error of guideway

Fig. 4. Experimental setup

Fig. 5. Schematic diagram of temperature measurement experiments. (a) The first temperature measurement experiment; (b) the second temperature measurement experiment

Fig. 6. PV and STD of displacements per hour. (a) PV of displacements per hour; (b) STD of displacements per hour

Fig. 7. Results of the first temperature measurement experiment. (a) Temperature variation curves; (b) displacement variation curves

Fig. 8. Results of the second temperature measurement experiment. (a) Temperature variation curves; (b) displacement variation curves

Fig. 9. Surface profiles of five measurements and difference between each profile and average profile. (a) Surface profile; (b) difference between each profile and average profile

Fig. 10. Experimental results of sensors and Fizeau interferometer