Opto-Mechanical Thermal Integration Analysis and Optimization of KrF Deep Ultraviolet Lithography Projection Lens

Xing Han; Lun Jiang; Yanwei Li; Junchi Li

doi:10.3788/AOS231895

Acta Optica Sinica, Volume. 44, Issue 7, 0722001(2024)

Opto-Mechanical Thermal Integration Analysis and Optimization of KrF Deep Ultraviolet Lithography Projection Lens

Xing Han^1,3, Lun Jiang^1,2、*, Yanwei Li^3、**, and Junchi Li³

Author Affiliations

¹School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin , China

²National and Local Joint Engineering Research Center of Space Photoelectric Technology, Changchun University of Science and Technology, Changchun 130022, Jilin , China

³Ji Hua Laboratory, Foshan 528200, Guangdong , China

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Xing Han, Lun Jiang, Yanwei Li, Junchi Li. Opto-Mechanical Thermal Integration Analysis and Optimization of KrF Deep Ultraviolet Lithography Projection Lens[J]. Acta Optica Sinica, 2024, 44(7): 0722001

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Paper Information

Category: Optical Design and Fabrication

Received: Dec. 6, 2023

Accepted: Jan. 5, 2024

Published Online: Apr. 11, 2024

The Author Email: Lun Jiang (jlciomp@163.com), Yanwei Li (yanwei201314@163.com)

DOI:10.3788/AOS231895

CSTR:32393.14.AOS231895

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