Research progress of optical fiber Fabry-Perot interferometer high temperature sensors

Ai-wu LI; Tian-qi SHAN; Qi GUO; Xue-peng PAN; Shan-ren LIU; Chao CHEN; Yong-sen YU

doi:10.37188/CO.2021-0219

Chinese Optics, Volume. 15, Issue 4, 609(2022)

Research progress of optical fiber Fabry-Perot interferometer high temperature sensors

Ai-wu LI¹, Tian-qi SHAN¹, Qi GUO¹, Xue-peng PAN¹, Shan-ren LIU¹, Chao CHEN², and Yong-sen YU^1、*

¹State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

²State Key Laboratory of Luminescence and Application, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

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Figures & Tables(13)

Fig. 1. Schematic diagram of multi-beam interference

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Fig. 2. Structure diagrams of a typical (a) IFPI, (b) EFPI and (c) ILFPI

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Fig. 3. (a) Sourceless EFPI high temperature sensor based on sapphire fiber and sapphire wafer^[75]; (b) self-filtering EFPI high temperature sensor fabricated by double sapphire fiber and sapphire wafer^[12]

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Fig. 4. (a) FPI high temperature sensor based on sapphire fiber and sapphire wafer^[34]; (b) EFPI high temperature sensor fabricated by direct bonding of three-layer sapphire wafers^[10]

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Fig. 5. (a) ILFPI sensor fabricated by fusion of SMF and HCF^[68]; (b) hybrid fiber-optic sensor fabricated by cascade of FBG and FPI^[83]; (c) fiber-optic FPI sensor fabricated by CDF^[32]

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Fig. 6. (a) FPI sensor fabricated by inserting FBG and HST into quartz sleeve^[51]; (b) FPI sensor fabricated by direct bonding of sapphire wafer^[5]; (c) SMF grooved by femtosecond laser, then FPI fabricated by polishing and welding^[6]

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Fig. 7. Schematic diagram of optical fiber FPI high temperature acceleration sensors^[84]

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Fig. 8. Schematic diagram of FPI high temperature vibration sensors based on micro-cantilever beam^[85]

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Fig. 9. Schematic diagram of 6H-SiC sapphire fiber vibration sensor^[86]

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Table 1. Comparison of parameters of various IFPIs

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Table 1. Comparison of parameters of various IFPIs

IFPI	温度测量范围	温度灵敏度	应变/压力测量范围	应变/压力灵敏度
注：表中在灵敏度后标注的OPD(Optical Path Difference)为光程差，是通过测量FPI的腔长变化来对外界环境参数进行传感。未进行标注的则是通过测量反射峰的漂移来对外界环境参数进行传感。
2009^[16]	25~600 °C	68.6 pm/°C
2010^[17]	23~1200 °C	17.5 nm/°C(OPD)
2011^[18]	200~1000 °C	1.75×10⁻⁵ °C
2012^[19]	25~1100 °C	39.1 nm/°C(OPD)
2013^[20]	24~1000 °C	17.7 pm/°C
2014^[21]	30~900 °C	13.9 pm/°C
2015^[22]	400~1000 °C	40.7 pm/°C(OPD)
2015^[23]	17~1200 °C	10 pm/°C
2018^[24]	25~1000 °C	13.6 pm/°C
2018^[25]	500~1000 °C	18.6 pm/°C
2018^[26]	20~1000 °C	13.57 pm/°C
2018^[27]	300~1200 °C	15.61 pm/°C
2019^[28]	100~1100 °C	16.92 pm/°C
2019^[4]	400~1100 °C	15.88 pm/°C
2019^[29]	400~1100 °C	16.36 pm/°C	0~2000 με	1.06 pm/με
2019^[30]	300~1200 °C	15.68 pm/°C
2019^[31]	0~1600 °C	13.2 pm/°C(1200 °C)
2019^[32]	32~1200 °C	15.6 pm/°C	0~3000 µε	1.5 pm/µε(900 °C)
2020^[33]	100~1000 °C	15.34 pm/°C
2020^[14]	15~1000 °C	15.4 pm/°C	0~2800 με	1.04 pm/με
2020^[34]	25~1550 °C	32.5 pm/°C(1550 °C)
2020^[35]	20~800 °C	24.52 pm/°C
2020^[36]	50~800 °C	12.51 pm/°C(800 °C)
2020^[37]	200~1200 °C	15.42 pm/°C
2020^[38]	23~1000 °C	17.15 nm/°C(OPD)
2020^[39]	400~1000 °C	17.1 pm/°C

Table 2. Comparison of parameters of various EFPIs

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Table 2. Comparison of parameters of various EFPIs

EFPI	温度测量范围	温度灵敏度	应变/压力测量范围	应变/压力灵敏度
2005^[40]	230~1600 °C	2.798 nm/°C
2010^[41]	20~1050 °C	20 pm/°C(OPD)
2012^[42]	100~700 °C	0.98 pm/°C	0~800 με	3.14 pm/με
2013^[43]	20~700 °C	4.44 pm/°C	0~689.5 kPa	0.28 pm/Pa
2014^[44]	20~800 °C	0.59 pm/°C	0~3700 με	1.5 pm/με
2016^[45]	23~600 °C	12.3 pm/°C	0~2104 με	1.74 pm/με
2017^[46]	23~600 °C	0.51 pm/°C	0~3 MPa	1.53 nm/MPa(600 °C)
2017^[47]	23~1000 °C	20.31 pm/°C
2017^[48]	19~1000 °C	14.68 pm/°C
2017^[49]	20~900 °C	0.044 pm/°C	0.1~0.7 MPa	1.14 nm/MPa(800 °C)
2018^[50]	20~600 °C	0.17 pm/°C	0~1.0 MPa	−5.912 nm/MPa(600 °C)
2018^[51]	20~800 °C	14.8 pm/°C	0.1~0.7 MPa	4.28 nm/MPa
2018^[15]	20~800 °C	19.8 nm/°C(OPD)	0~10 MPa	98 nm/MPa
2019^[12]	100~1080 °C	4.786 nm/°C(OPD)
2019^[52]	100~800 °C	14.31 pm/°C
2019^[53]	20~1000 °C	12.26 nm/°C
2019^[6]	20~1000 °C	108.11 pm/°C(OPD)	0~10 MPa	70.85 nm/MPa
2019^[5]	20~800 °C	1.25 nm/°C(OPD)	20~700 kPa	2.768 μm/MPa(OPD)
2019^[54]	20~700 °C	0.215 nm/°C	0~500 kPa	5.22 nm/MPa
2019^[55]	20~1000 °C	15.41 pm/°C	0~1000 µε	1.19 pm/µε(900 °C)
2020^[56]	25~1000 °C	0.77 pm/°C
2020^[10]	-50~1200 °C	23 pm/°C	0.4~4.0 MPa	1.2 nm/MPa(1200 °C)
2020^[11]	23~1455 °C	1.32 nm/°C(OPD)
2020^[57]	100~800 °C	10.74 pm/°C	0~900 µε	21.46 μm/µε(800 °C)
2020^[58]	100~1000 °C	18.01 pm/°C	0~450 µε	2.17 pm/µε(800 °C)
2021^[59]	200~800 °C	29.9 pm/°C

Table 3. Comparison of parameters of various ILFPIs

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Table 3. Comparison of parameters of various ILFPIs

ILFPI	温度测量范围	温度灵敏度	应变/压力测量范围	应变/压力灵敏度
2009^[60]	100~600 °C	1.4 nm/°C	0~400 με	5.95 nm/µε
2011^[61]	50~750 °C	0.6 pm/°C	0~950 με	2.3 pm/με
2011^[62]	25~700 °C	13.7 pm/°C	0~40 MPa	−5.8 pm/MPa
2015^[63]	0~700 °C	0.45 pm/°C	0~10 MPa	54.7 pm/MPa
2015^[64]	250~1050 °C	1.019 nm/°C(1050 °C)
2015^[65]	23~900 °C	0.85 pm/°C	0~1000 με	13.9 pm/με
2016^[66]	17~900 °C	13.97 pm/°C	0~600 με	1.23 pm/με
2018^[67]	100~800 °C	17 nm/°C(OPD)	0~10 MPa	1.336 μm/MPa
2018^[68]	0~1005 °C	33.4 pm/°C	0~1400 με	0.46 pm/με
2019^[69]	20~900 °C	0.82 pm/°C	0.3~2.7 MPa	4.24 nm/MPa
2019^[70]	24~1000 °C	535.16 pm/°C
2020^[71]	20~1000 °C	0.64 pm/°C	0~1000 με	1.23 pm/με
2020^[72]	100~1100 °C	16.91 pm/°C	0~2400 με	1 pm/με
2020^[73]	40~1000 °C	25.3 nm/°C	0~10 MPa	356.5 nm/MPa(1000 °C)

Table 4. Comparison of cross-sensitivity of FPI high temperature strain/pressure sensors

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Table 4. Comparison of cross-sensitivity of FPI high temperature strain/pressure sensors

FPI	温度灵敏度	应变/压力灵敏度	交叉灵敏度
2011^[61]	0.6 pm/°C	2.3 pm/με	4 με/ °C
2013^[43]	4.44 pm/°C	0.28 pm/Pa	15.86 Pa/ °C
2015^[65]	0.85 pm/°C	13.9 pm/με	0.18 με/ °C
2018^[15]	19.8 nm/°C(OPD)	98 nm/MPa	1490 Pa/ °C
2018^[67]	17 nm/°C	1.336 μm/MPa	−15 Pa/ °C，0.3 °C/MPa
2019^[6]	108.11 pm/°C(OPD)	70.85 nm/MPa	1525 Pa/ °C
2019^[55]	0.215 nm/°C	5.22 nm/MPa	67.6 Pa/ °C
2019^[69]	0.82 pm/°C	4.24 nm/MPa	192 Pa/ °C
2020^[10]	23 pm/°C	1.2 nm/MPa	2×10⁴ Pa/ °C

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Ai-wu LI, Tian-qi SHAN, Qi GUO, Xue-peng PAN, Shan-ren LIU, Chao CHEN, Yong-sen YU. Research progress of optical fiber Fabry-Perot interferometer high temperature sensors[J]. Chinese Optics, 2022, 15(4): 609

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Paper Information

Category: Review

Received: Dec. 13, 2021

Accepted: Mar. 23, 2022

Published Online: Sep. 6, 2022

The Author Email:

DOI:10.37188/CO.2021-0219

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