Fig. 1. Schematic of atom lithography

Fig. 2. Atomic furnace tube configuration. (a) First kind; (b) second kind

Fig. 3. Atomic furnace tube and its coordinate system. (a) Configuration; (b) coordinate system

Fig. 4. Relationship between nozzle blade angle and atom flux

Fig. 5. Eruption volume comparison among three kinds of atomic furnace tubes

Fig. 6. Schematic of atomic beam collimation

Fig. 7. Experimental result of morphology and profile of nano-grating fabricated by third kinds of furnace tube. (a) Atomic force microscope image of nano-grating; (b) profile comparison of nano-grating